Charged Particle Beam Device and Charged Particle Beam Device Control Method
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Accused Products
Abstract
The objective of the present invention is to provide a charged particle beam device, wherein the positional relationship between reflected electron detection elements and a sample and the vacuum state of the sample surroundings are evaluated to select automatically a reflected electron detection element appropriate for acquiring an intended image. In this charged particle beam device, all the reflected electron detection elements are selected when the degree of vacuum inside the sample chamber is high and the sample is distant from the reflected electron detectors, while a reflected electron detection element appropriate for acquiring a compositional image or a height map image is selected when the degree of vacuum inside the sample chamber is high and the sample is close to the reflected electron detectors. When the degree of vacuum inside the sample chamber is low, all the reflected electron detection elements are selected.
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Citations
34 Claims
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1-18. -18. (canceled)
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19. A charged particle beam device irradiating a charged particle beam to a sample, the charged particle beam device comprising:
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a charged particle beam source configured to emit a charged particle beam; a sample moving device configured to move a position of the sample; a reflected electron detector having a plurality of detection elements configured to detect, by irradiating the charged particle beam to the sample, a reflected electron generated from the sample; a signal control circuit configured to select, from among the detection elements that the reflected electron detector has, a detection element to be used; a pressure meter configured to measure an atmospheric pressure inside a sample chamber where the sample is disposed; and an exhaust system configured to vacuum exhaust the inside of the sample chamber, wherein a plurality of the detection elements are disposed along a concentric ring; when the atmospheric pressure inside the sample chamber is smaller than a predetermined atmospheric pressure threshold value and a distance between the sample and the reflected electron detector along an irradiation axis of the charged particle beam is greater than or equal to a predetermined distance threshold value, the signal control circuit selects all of the detection elements; and when the atmospheric pressure inside the sample chamber is smaller than the predetermined atmospheric pressure threshold value and the distance is smaller than the predetermined distance threshold value, the signal control circuit selects at least one of the detection elements other than the detection element disposed along the concentric ring on an innermost circumference side or at least one of the detection elements other than the detection element disposed along the concentric ring on an outermost circumference side. - View Dependent Claims (20, 21, 22, 23, 24, 25)
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26. A charged particle beam device irradiating a charged particle beam to a sample, the charged particle beam device comprising:
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a charged particle beam source configured to emit a charged particle beam; a sample moving device configured to move a position of the sample; a reflected electron detector having a plurality of detection elements configured to detect, by irradiating the charged particle beam to the sample, a reflected electron generated from the sample; a signal control circuit configured to select, from among the detection elements that the reflected electron detector has, a detection element to be used; a pressure meter configured to measure an atmospheric pressure inside a sample chamber where the sample is disposed; and an exhaust system configured to vacuum exhaust inside the sample chamber, wherein a plurality of the detection elements are disposed along a concentric ring; and when the atmospheric pressure inside the sample chamber is greater than or equal to a predetermined atmospheric pressure threshold value, the signal control circuit selects all of the detection elements without respect to a distance between the sample and the reflected electron detector along an irradiation axis of the charged particle beam. - View Dependent Claims (27, 28, 29, 30, 31, 32)
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33. A method of controlling a charged particle beam device irradiating a charged particle beam to a sample,
the charged particle beam device comprising; -
a charged particle beam source configured to emit a charged particle beam; a sample moving device configured to move a position of the sample; a reflected electron detector having a plurality of detection elements configured to detect, by irradiating the charged particle beam to the sample, a reflected electron generated from the sample; a pressure meter configured to measure an atmospheric pressure inside a sample chamber where the sample is disposed; and an exhaust system configured to vacuum exhaust the inside of the sample chamber, a plurality of the detection elements disposed along a concentric ring, the method comprising a signal control step of selecting, from among the detection elements that the reflected electron detector has, a detection element to be used, wherein in the signal control step, when the atmospheric pressure inside the sample chamber is smaller than a predetermined atmospheric pressure threshold value and a distance between the sample and the reflected electron detector along an irradiation axis of the charged particle beam is greater than or equal to a predetermined distance threshold value, all of the detection elements are selected; and when the atmospheric pressure inside the sample chamber is smaller than the predetermined atmospheric pressure threshold value and the distance is smaller than the predetermined distance threshold value, at least one of the detection elements other than the detection elements disposed along the concentric ring on an innermost circumference side or at least one of the detection elements other than the detection elements disposed along the concentric ring on an outermost circumference side is selected.
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34. A method of controlling a charged particle beam device irradiating a charged particle beam to a sample,
the charged particle beam device comprising; -
a charged particle beam source configured to emit a charged particle beam; a sample moving device configured to move a position of the sample; a reflected electron detector having a plurality of detection elements configured to detect, by irradiating the charged particle beam to the sample, a reflected electron generated from the sample; a pressure meter configured to measure an atmospheric pressure inside a sample chamber where the sample is disposed; and an exhaust system configured to vacuum exhaust the inside of the sample chamber, a plurality of the detection elements disposed along a concentric ring, the method comprising a signal control step of selecting, from among the detection elements that the reflected electron detector has, a detection element to be used, wherein in the signal control step, when the atmospheric pressure inside the sample chamber is greater than or equal to a predetermined atmospheric pressure threshold value, all of the detection elements are selected without respect to a distance between the sample and the reflected electron detector along an irradiation axis of the charged particle beam.
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Specification