THIN FILM TRANSISTOR SUBSTRATE AND METHOD FOR MANUFACTURING SAME
First Claim
1. A thin film transistor substrate comprising:
- a substrate;
a gate electrode and a first electrode of a capacitor formed above the substrate, the gate electrode and the first electrode being arranged along a plane of the substrate;
a gate insulating film formed on the gate electrode;
a semiconductor layer formed on the gate insulating film;
an insulating layer formed on the semiconductor layer and above the first electrode, the insulating layer leaving portions of the semiconductor layer exposed;
a source electrode and a drain electrode formed above the insulating layer, the source electrode and the drain electrode being connected to the semiconductor layer at the exposed portions of the semiconductor layer; and
a second electrode of the capacitor formed above the insulating layer, at a position opposite the first electrode,wherein the insulating layer above the gate electrode is thicker than the insulating layer above the first electrode.
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Accused Products
Abstract
A thin film transistor substrate includes: a gate electrode and a first electrode of a capacitor formed above a substrate so as to be arranged along a plane of the substrate; a gate insulating film formed on the gate electrode; a semiconductor layer formed on the gate insulating film; an insulating layer formed on the semiconductor layer and above the first electrode so as to expose portions of the semiconductor layer; a source electrode and a drain electrode formed above the insulating layer so as to be connected to the semiconductor layer at the exposed portions of the semiconductor layer; and a second electrode of the capacitor formed above the insulating layer, at a position opposite the first electrode, and the insulating layer above the gate electrode is thicker than the insulating layer above the first electrode.
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Citations
13 Claims
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1. A thin film transistor substrate comprising:
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a substrate; a gate electrode and a first electrode of a capacitor formed above the substrate, the gate electrode and the first electrode being arranged along a plane of the substrate; a gate insulating film formed on the gate electrode; a semiconductor layer formed on the gate insulating film; an insulating layer formed on the semiconductor layer and above the first electrode, the insulating layer leaving portions of the semiconductor layer exposed; a source electrode and a drain electrode formed above the insulating layer, the source electrode and the drain electrode being connected to the semiconductor layer at the exposed portions of the semiconductor layer; and a second electrode of the capacitor formed above the insulating layer, at a position opposite the first electrode, wherein the insulating layer above the gate electrode is thicker than the insulating layer above the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for manufacturing a thin film transistor substrate, the method comprising:
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(i) forming a gate electrode and a first electrode of a capacitor above a substrate, the gate electrode and the first electrode being arranged along a plane of the substrate; (ii) forming a gate insulating film, a semiconductor layer, and an insulating layer in sequence by continuously stacking a first insulating film, a semiconductor film, and a second insulating film in sequence, on the gate electrode and the first electrode; and (iii) exposing portions of the semiconductor layer, forming a source electrode and a drain electrode above the insulating layer, and forming a second electrode of the capacitor above the first electrode and the insulating layer, the source electrode and the drain electrode being connected to the semiconductor layer at the exposed portions, wherein in step (ii), at least a portion of the second insulating film above the first electrode is removed to make the insulating layer above the gate electrode thicker than the insulating layer above the first electrode. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification