SUBSTRATE-FREE THIN-FILM FLEXIBLE PHOTOVOLTAIC DEVICE AND FABRICATION METHOD
First Claim
Patent Images
1. A method for thermal exfoliation, comprising:
- providing a target layer on a substrate to form a structure;
depositing a stressor layer on the target layer;
placing the structure in a temperature controlled environment to induce differential thermal expansion between the target layer and the substrate; and
exfoliating the target layer from the substrate when a critical temperature is achieved such that the target layer is separated from the substrate to produce a standalone, thin film device.
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Abstract
A method for thermal exfoliation includes providing a target layer on a substrate to form a structure. A stressor layer is deposited on the target layer. The structure is placed in a temperature controlled environment to induce differential thermal expansion between the target layer and the substrate. The target layer is exfoliated from the substrate when a critical temperature is achieved such that the target layer is separated from the substrate to produce a standalone, thin film device.
16 Citations
20 Claims
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1. A method for thermal exfoliation, comprising:
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providing a target layer on a substrate to form a structure; depositing a stressor layer on the target layer; placing the structure in a temperature controlled environment to induce differential thermal expansion between the target layer and the substrate; and exfoliating the target layer from the substrate when a critical temperature is achieved such that the target layer is separated from the substrate to produce a standalone, thin film device. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for thermal exfoliation comprising:
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forming a stressor layer on a photovoltaic device structure; placing the photovoltaic device in a temperature controlled environment to induce differential thermal expansion at an interface between the photovoltaic device structure and a substrate; and exfoliating the substrate when a critical temperature is achieved such that the photovoltaic device structure is separated from the substrate to produce a standalone, thin film photovoltaic device. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 18, 19, 20)
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17. A photovoltaic device, comprising:
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an absorber layer having a back contact formed on the absorber layer, the back contact having an exposed surface free from a substrate; a transparent conductive layer formed on the absorber layer opposite the back contact; a top contact formed in contact with the transparent conductive layer; and a stressor layer formed over the top contact.
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Specification