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ENCODER SCALE, ENCODER, DRIVE APPARATUS, AND STAGE APPARATUS

  • US 20160209241A1
  • Filed: 03/31/2016
  • Published: 07/21/2016
  • Est. Priority Date: 10/02/2013
  • Status: Active Grant
First Claim
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1. An encoder scale that includes a substrate configured to rotate about a rotation axis and has an optical pattern along a rotating direction on a first surface crossing the rotation axis, of the substrate, the encoder scale comprising:

  • a first magnet disposed on a second surface different from the first surface, of the substrate, the first magnet having different magnetic poles set therein with the rotation axis therebetween; and

    a second magnet or a magnetic yoke disposed on the first surface and configured to generate magnetic fields with the magnetic poles of the first magnet.

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