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Monitoring a Discharge in a Plasma Process

  • US 20160217975A1
  • Filed: 04/01/2016
  • Published: 07/28/2016
  • Est. Priority Date: 10/01/2013
  • Status: Active Grant
First Claim
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1. A plasma discharge monitor comprising:

  • a signal detector responsive toat least a first signal path of at least one plasma supply signal within at least a first time range within at least one period of the plasma supply signal, andat least a second signal path of at least one plasma supply signal within at least a second time range located at one or more points corresponding to the first time range in at least one other period of the plasma supply signal; and

    an identification signal generator configured to generate an identification signal if the second signal path deviates by at least a distance from the first signal path, wherein the distance has a minimum time difference and a minimum signal amplitude difference.

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