BARRIER LAYER ABOVE ANTI-PUNCH THROUGH (APT) IMPLANT REGION TO IMPROVE MOBILITY OF CHANNEL REGION OF FIN FIELD EFFECT TRANSISTOR (FINFET) DEVICE STRUCTURE
First Claim
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1. A fin field effect transistor (FinFET) device structure, comprising:
- a substrate;
a fin structure extending from the substrate;
an anti-punch through implant (APT) region formed in the fin structure;
a barrier layer formed on the APT region, wherein the barrier layer has a middle portion and a peripheral portion, and the middle portion is higher than the peripheral portion; and
an epitaxial layer formed on the barrier layer.
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Abstract
A fin field device structure and method for forming the same are provided. The FinFET device structure includes a substrate and a fin structure extending from the substrate. The FinFET device structure also includes an anti-punch through implant (APT) region formed in the fin structure and a barrier layer formed on the APT region. The barrier layer has a middle portion and a peripheral portion, and the middle portion is higher than the peripheral portion. The FinFET device structure further includes an epitaxial layer formed on the barrier layer.
34 Citations
20 Claims
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1. A fin field effect transistor (FinFET) device structure, comprising:
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a substrate; a fin structure extending from the substrate; an anti-punch through implant (APT) region formed in the fin structure; a barrier layer formed on the APT region, wherein the barrier layer has a middle portion and a peripheral portion, and the middle portion is higher than the peripheral portion; and an epitaxial layer formed on the barrier layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A fin field effect transistor (FinFET) device structure, comprising:
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a substrate; a first fin structure and a second fin structure formed on the substrate; a first an anti-punch through implant (APT) region formed in the first fin structure; a barrier layer formed on the first APT region, wherein the barrier layer has a convex structure; and an epitaxial layer formed on the barrier layer; and a second APT region formed in the second fin structure. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A method for forming a fin field effect transistor (FinFET) device structure, comprising:
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providing a substrate; forming a fin structure on the substrate; forming an anti-punch through implant (APT) region formed in the fin structure; forming a barrier layer on the APT region, wherein the barrier layer has a middle portion and a peripheral portion, and the middle portion is higher than the peripheral portion; and forming an epitaxial layer on the barrier layer. - View Dependent Claims (18, 19, 20)
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Specification