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MEMS DEVICE INCLUDING SUPPORT STRUCTURE AND METHOD OF MANUFACTURING

  • US 20160229684A1
  • Filed: 09/23/2014
  • Published: 08/11/2016
  • Est. Priority Date: 09/24/2013
  • Status: Abandoned Application
First Claim
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1. A micro-electro-mechanical system (MEMS) device comprising:

  • a top cap wafer and a bottom cap wafer;

    a MEMS wafer disposed between the top cap wafer and the bottom cap wafer, the top cap wafer, the bottom cap wafer and the MEMS wafer defining sidewalls of a cavity;

    a MEMS structure housed within the cavity and movable relative to the top and bottom caps;

    at least one electrode provided in one of the top cap wafer, the MEMS wafer and the bottom cap wafer, said at least one electrode being operatively coupled to the MEMS structure to detect or induce a movement thereof; and

    a support structure extending through the cavity from the top cap wafer to the bottom cap wafer to prevent bowing in the top cap wafer and bottom cap wafer.

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