CURVED RF ELECTRODE FOR IMPROVED CMAX
First Claim
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1. A MEMS DVC, comprising:
- an RF electrode having a substantially convex top surface; and
a plate electrode having a substantially concave portion disposed over the convex top surface of the RF electrode.
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Abstract
The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface as of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.
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Citations
15 Claims
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1. A MEMS DVC, comprising:
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an RF electrode having a substantially convex top surface; and a plate electrode having a substantially concave portion disposed over the convex top surface of the RF electrode. - View Dependent Claims (2, 3)
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4. A method of manufacturing a MEMS DVC, comprising:
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forming one or more electrodes over a substrate; depositing a dielectric layer over the electrodes and the substrate; chemical mechanically polishing the dielectric layer to expose the one or more electrodes, wherein the chemical mechanical polishing results in a convex upper surface of the one or more electrodes; and forming a plate electrode over the one or more electrodes, wherein the plate electrode has a bottom surface having a concave portion overlying the convex upper surface of the one or more electrodes. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification