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CURVED RF ELECTRODE FOR IMPROVED CMAX

  • US 20160240320A1
  • Filed: 09/24/2014
  • Published: 08/18/2016
  • Est. Priority Date: 10/02/2013
  • Status: Active Grant
First Claim
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1. A MEMS DVC, comprising:

  • an RF electrode having a substantially convex top surface; and

    a plate electrode having a substantially concave portion disposed over the convex top surface of the RF electrode.

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