MANUFACTURING METHOD FOR ARRAY SUBSTRATE, ARRAY SUBSTRATE AND DISPLAY DEVICE
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Abstract
A manufacturing method comprises steps of: forming a metal pattern having a thickness d on a substrate; forming an insulating film layer on the substrate on which the metal pattern is formed, so that the insulating film layer has an overlap region with the metal pattern, an absolute value of a height difference between the overlap region of the insulating film layer and other regions of the insulating film layer being less than the thickness d; and, forming a pattern of a semiconductor layer and a source/drain metal layer on the substrate on which the insulating film layer is formed.
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Citations
43 Claims
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1-23. -23. (canceled)
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24. A manufacturing method for an array substrate, comprising steps of:
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forming a metal pattern having a thickness d on a substrate; forming an insulating film layer on the substrate on which the metal pattern is formed so that the insulating film layer has an overlap region with the metal pattern, an absolute value of a height difference between the overlap region of the insulating film layer and other regions of the insulating film layer being less than the thickness d; and forming a pattern of a semiconductor layer and a source/drain metal layer on the substrate on which the insulating film layer is formed. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. An array substrate, comprising:
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a substrate; a metal pattern having a thickness d formed on the substrate; an insulating film layer formed on the substrate on which the metal pattern is formed, wherein the insulating film layer has an overlap region with the metal pattern, and an absolute value of a height difference between the overlap region of the insulating film layer and other regions of the insulating film layer is less than the thickness d; and a pattern of a semiconductor layer and a source/drain metal layer formed on the insulating film layer. - View Dependent Claims (38, 39, 40, 41, 42, 43)
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Specification