Liquid Discharge Apparatus and Method for Producing Piezoelectric Actuator
First Claim
1. A liquid discharge apparatus configured to discharge liquid, comprising:
- a channel substrate including a plurality of first pressure chambers aligned in a first direction, and a plurality of second pressure chambers aligned in the first direction arranged on one side in a second direction orthogonal to the first direction with respect to the plurality of first pressure chambers;
a plurality of first individual electrodes arranged to face the first pressure chambers;
a plurality of second individual electrodes arranged to face the second pressure chambers;
a piezoelectric layer arranged to cover the plurality of first individual electrodes and the plurality of second individual electrodes in a stacking direction;
a common electrode arranged to cover the piezoelectric film in the stacking direction and face the plurality of first and second individual electrodes; and
first traces connected to exposed portions of the first individual electrodes exposed from the piezoelectric film and each of which passes from the exposed portion between the two second individual electrodes adjoining in the first direction to extend to the one side in the second direction,wherein a cutout, which is cut out from the one side in the second direction so that the cutout is not overlapped with the first trace, is formed between portions of the common electrode facing the two adjoining second individual electrodes; and
the first trace is formed continuously from the exposed portion to an upper surface of the piezoelectric film.
1 Assignment
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Accused Products
Abstract
A liquid discharge apparatus is provided, which comprises a channel substrate formed with a plurality of first and second pressure chambers disposed in a first direction, a plurality of first and second individual electrodes, a piezoelectric film, a common electrode, and first traces. The first traces are connected to exposed portions of the first individual electrodes exposed from the piezoelectric film, and each of the first traces passes from the exposed portion between the two second individual electrodes to extend to the one side in the second direction. A cutout, which is cut out from the one side in the second direction, is formed so that the cutout is not overlapped with the first trace between portions of the common electrode opposed to the two adjoining second individual electrodes. The first trace is formed continuously from the exposed portion to an upper surface of the piezoelectric film.
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Citations
21 Claims
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1. A liquid discharge apparatus configured to discharge liquid, comprising:
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a channel substrate including a plurality of first pressure chambers aligned in a first direction, and a plurality of second pressure chambers aligned in the first direction arranged on one side in a second direction orthogonal to the first direction with respect to the plurality of first pressure chambers; a plurality of first individual electrodes arranged to face the first pressure chambers; a plurality of second individual electrodes arranged to face the second pressure chambers; a piezoelectric layer arranged to cover the plurality of first individual electrodes and the plurality of second individual electrodes in a stacking direction; a common electrode arranged to cover the piezoelectric film in the stacking direction and face the plurality of first and second individual electrodes; and first traces connected to exposed portions of the first individual electrodes exposed from the piezoelectric film and each of which passes from the exposed portion between the two second individual electrodes adjoining in the first direction to extend to the one side in the second direction, wherein a cutout, which is cut out from the one side in the second direction so that the cutout is not overlapped with the first trace, is formed between portions of the common electrode facing the two adjoining second individual electrodes; and the first trace is formed continuously from the exposed portion to an upper surface of the piezoelectric film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for producing a piezoelectric actuator, comprising:
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forming, on a channel substrate, a plurality of first individual electrodes which are disposed in a first direction, and a plurality of second individual electrodes which are disposed in the first direction and which are arranged on one side in a second direction orthogonal to the first direction with respect to the plurality of first individual electrodes; forming a piezoelectric film so that the plurality of first individual electrodes and the plurality of second individual electrodes are covered therewith; removing a part of the piezoelectric film covering portions of the first individual electrodes to form exposed portions which are exposed from the piezoelectric film; forming, on a surface of the piezoelectric film disposed on a side opposite to the channel substrate, a common electrode which faces the plurality of first individual electrodes and the plurality of second individual electrodes and which includes cutouts cut out from the one side in the second direction, the cutout being disposed between portions facing the two second individual electrodes adjoining in the first direction; and forming traces connected to the exposed portions after forming the common electrode, the trace being allowed to pass through an area of the common electrode disposed between the two second individual electrodes in which the cutout is formed and the trace extending to the one side in the second direction. - View Dependent Claims (20, 21)
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Specification