Liquid Discharge Apparatus and Method for Producing Piezoelectric Actuator

• US 20160243829A1
• Filed: 02/25/2016
• Published: 08/25/2016
• Est. Priority Date: 02/25/2015
• Status: Active Grant

• Current Assignee: Brother Kogyo Kabushiki Kaisha (Brother Industries Limited)
• Original Assignee: Brother Kogyo Kabushiki Kaisha (Brother Industries Limited)
• Inventors: Naito, Kyohei, Yamamoto, Jiro, Koide, Shohei
• Granted Patent: US 9,566,789 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B41J 2/14233 of film type, deformed by bending and disposed on a diaphragm
• CPC Class Codes: B41J 2/161 of film type, deformed by bending and disposed on a diaphragm
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2002/14491 Electrical connection

Abstract

A liquid discharge apparatus is provided, which comprises a channel substrate formed with a plurality of first and second pressure chambers disposed in a first direction, a plurality of first and second individual electrodes, a piezoelectric film, a common electrode, and first traces. The first traces are connected to exposed portions of the first individual electrodes exposed from the piezoelectric film, and each of the first traces passes from the exposed portion between the two second individual electrodes to extend to the one side in the second direction. A cutout, which is cut out from the one side in the second direction, is formed so that the cutout is not overlapped with the first trace between portions of the common electrode opposed to the two adjoining second individual electrodes. The first trace is formed continuously from the exposed portion to an upper surface of the piezoelectric film.

Claims

1. A liquid discharge apparatus configured to discharge liquid, comprising:

a channel substrate including a plurality of first pressure chambers aligned in a first direction, and a plurality of second pressure chambers aligned in the first direction arranged on one side in a second direction orthogonal to the first direction with respect to the plurality of first pressure chambers;

a plurality of first individual electrodes arranged to face the first pressure chambers;

a plurality of second individual electrodes arranged to face the second pressure chambers;

a piezoelectric layer arranged to cover the plurality of first individual electrodes and the plurality of second individual electrodes in a stacking direction;

a common electrode arranged to cover the piezoelectric film in the stacking direction and face the plurality of first and second individual electrodes; and

first traces connected to exposed portions of the first individual electrodes exposed from the piezoelectric film and each of which passes from the exposed portion between the two second individual electrodes adjoining in the first direction to extend to the one side in the second direction,

wherein a cutout, which is cut out from the one side in the second direction so that the cutout is not overlapped with the first trace, is formed between portions of the common electrode facing the two adjoining second individual electrodes; and

the first trace is formed continuously from the exposed portion to an upper surface of the piezoelectric film.

2. The liquid discharge apparatus according to claim 1, wherein:

a slit, which extends in the second direction, is formed at a portion of the piezoelectric film disposed between the two second individual electrodes adjoining in the first direction; and

the exposed portion is a portion of the first individual electrode which extends to the slit and which is exposed from the slit.

3. The liquid discharge apparatus according to claim 1, further comprising an auxiliary conductor which is brought in contact with two different portions of the common electrode.

4. The liquid discharge apparatus according to claim 3, wherein the auxiliary conductor includes a first conductive portion which extends in the first direction on the other side in the second direction as compared with the first individual electrode and which is brought in contact with two portions of the common electrode separated in the first direction.

5. The liquid discharge apparatus according to claim 4, wherein the auxiliary conductor includes a second conductive portion which extends in the second direction from the first conductive portion between the two first individual electrodes adjoining in the first direction and which is brought in contact with the common electrode.

6. The liquid discharge apparatus according to claim 5, wherein a width in the first direction of the first trace passing between the two second individual electrodes is equal to a width in the first direction of the second conductive portion arranged between the two first individual electrodes.

7. The liquid discharge apparatus according to claim 5, wherein the auxiliary conductor and the first trace are formed of an identical material.

8. The liquid discharge apparatus according to claim 5, wherein a thickness in the stacking direction of the auxiliary conductor is the same as a thickness in the stacking direction of the first trace.

9. The liquid discharge apparatus according to claim 5, wherein the common electrode includes an opening formed in an area in which the second conductive portion is arranged.

10. The liquid discharge apparatus according to claim 9, wherein the common electrode includes the cutout which extends in the second direction and which is formed between the portions opposed to the two second individual electrodes adjoining in the first direction;

the opening, which is formed between portions of the common electrode facing the two first individual electrodes adjoining in the first direction, extends in the second direction; and

a length in the second direction of the cutout is the same as a length in the second direction of the opening, and a length in the first direction of the cutout is the same as a length in the first direction of the opening.

11. The liquid discharge apparatus according to claim 4, wherein the auxiliary conductor includes a third conductive portion which extends to the one side in the second direction from the first conductive portion on an outer side in the first direction as compared with the plurality of first individual electrodes and the plurality of second individual electrodes.

12. The liquid discharge apparatus according to claim 11, further comprising second traces which extend to the one side in the second direction from the second individual electrodes.

13. The liquid discharge apparatus according to claim 12, further comprising an electric connecting portion which is provided on the one side of the channel substrate in the second direction as compared with the second pressure chambers and which has first contacts connected to the first traces, second contacts connected to the second traces, and a third contact connected to the third conductive portion of the auxiliary conductor.

14. The liquid discharge apparatus according to claim 3, wherein the auxiliary conductor extends in the second direction between the two first individual electrodes adjoining in the first direction, and the auxiliary conductor is brought in contact with two portions of the common electrode separated in the second direction.

15. The liquid discharge apparatus according to claim 14, wherein a length in the first direction of the first trace passing between the two second individual electrodes is equal to a length in the first direction of the auxiliary conductor arranged between the two first individual electrodes.

16. The liquid discharge apparatus according to claim 14, wherein the auxiliary conductor and the first trace are formed of an identical material.

17. The liquid discharge apparatus according to claim 14, wherein a length in the stacking direction of the auxiliary conductor is the same as a length in the stacking direction of the first trace.

18. The liquid discharge apparatus according to claim 1, wherein the first trace is formed of one of gold and aluminum.

19. A method for producing a piezoelectric actuator, comprising:

forming, on a channel substrate, a plurality of first individual electrodes which are disposed in a first direction, and a plurality of second individual electrodes which are disposed in the first direction and which are arranged on one side in a second direction orthogonal to the first direction with respect to the plurality of first individual electrodes;

forming a piezoelectric film so that the plurality of first individual electrodes and the plurality of second individual electrodes are covered therewith;

removing a part of the piezoelectric film covering portions of the first individual electrodes to form exposed portions which are exposed from the piezoelectric film;

forming, on a surface of the piezoelectric film disposed on a side opposite to the channel substrate, a common electrode which faces the plurality of first individual electrodes and the plurality of second individual electrodes and which includes cutouts cut out from the one side in the second direction, the cutout being disposed between portions facing the two second individual electrodes adjoining in the first direction; and

forming traces connected to the exposed portions after forming the common electrode, the trace being allowed to pass through an area of the common electrode disposed between the two second individual electrodes in which the cutout is formed and the trace extending to the one side in the second direction.

20. The method for producing the piezoelectric actuator according to claim 19, wherein the trace is formed to extend continuously from the exposed portion to an upper surface of the piezoelectric film.

21. The method for producing the piezoelectric actuator according to claim 19, further comprising:

forming an auxiliary conductor which is brought in contact with two different portions of the common electrode respectively, wherein;

the traces and the auxiliary conductor are formed by means of an identical film formation process by using an identical material.