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HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM

  • US 20160244881A1
  • Filed: 02/22/2016
  • Published: 08/25/2016
  • Est. Priority Date: 02/24/2015
  • Status: Active Grant
First Claim
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1. A heat treatment system comprising:

  • a heating unit configured to heat an inside of a processing chamber in which a plurality of workpieces are accommodated;

    a heat treatment condition storing unit configured to store a heat treatment condition according to a heat treatment content, including a temperature in the processing chamber heated by the heating unit;

    a heat treatment change model storing unit configured to store a heat treatment change model that represents a relationship between a change of a temperature in the processing chamber and a change of a heat treatment result;

    a heat treatment performing unit configured to perform the heat treatment condition stored by the heat treatment condition storing unit;

    a heat treatment result receiving unit configured to receive a result of the heat treatment performed by the heat treatment performing unit; and

    an optimum temperature calculating unit configured to calculate a target heat treatment result for an in-plane shape of the workpiece, based on a target heat treatment result and information about a shape of the target heat treatment result, and calculate an optimum temperature that results in the target heat treatment result, based on the calculated target heat treatment result for the in-plane shape and the heat treatment change model stored in the heat treatment change model storing unit.

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