HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM

• US 20160244881A1
• Filed: 02/22/2016
• Published: 08/25/2016
• Est. Priority Date: 02/24/2015
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Ota, Hiroichi, Sekisawa, Shingo, Takenaga, Yuichi
• Granted Patent: US 10,640,871 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C23C 16/45578 Elongated nozzles, tubes with holes
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: H01L 21/67109 mainly by convection

Abstract

A heat treatment system includes a heating unit that heats an inside of a processing chamber in which a plurality of workpieces are accommodated; a heat treatment condition storing unit that stores a heat treatment condition; a heat treatment change model storing unit that stores a heat treatment change model; a heat treatment performing unit that performs the heat treatment condition; a heat treatment result receiving unit that receives a result of heat treatment performed; and an optimum temperature calculating unit that calculate a target heat treatment result for an in-plane shape of the workpiece based on a target heat treatment result and information about a shape of the target heat treatment result, and calculate an optimum temperature that results in the target heat treatment result, based on the calculated target heat treatment result and the heat treatment change model.

Claims

1. A heat treatment system comprising:

a heating unit configured to heat an inside of a processing chamber in which a plurality of workpieces are accommodated;

a heat treatment condition storing unit configured to store a heat treatment condition according to a heat treatment content, including a temperature in the processing chamber heated by the heating unit;

a heat treatment change model storing unit configured to store a heat treatment change model that represents a relationship between a change of a temperature in the processing chamber and a change of a heat treatment result;

a heat treatment performing unit configured to perform the heat treatment condition stored by the heat treatment condition storing unit;

a heat treatment result receiving unit configured to receive a result of the heat treatment performed by the heat treatment performing unit; and

an optimum temperature calculating unit configured to calculate a target heat treatment result for an in-plane shape of the workpiece, based on a target heat treatment result and information about a shape of the target heat treatment result, and calculate an optimum temperature that results in the target heat treatment result, based on the calculated target heat treatment result for the in-plane shape and the heat treatment change model stored in the heat treatment change model storing unit.

2. The heat treatment system of claim 1, wherein the optimum temperature calculating unit calculates the target heat treatment result for the in-plane shape of the workpiece, based on a target heat treatment result in a center portion and an edge portion of the workpiece and the information about the shape of the target heat treatment result, and calculates the optimum temperature that results in the target heat treatment result, based on the calculated target heat treatment result and the heat treatment change model stored in the heat treatment change model storing unit.

3. The heat treatment system of claim 1, wherein the processing chamber is divided into a plurality of zones,

the heating unit sets a temperature for each of the zones in the processing chamber,

the heat treatment condition stored in the heat treatment condition storing unit is set for each of the zones in the processing chamber,

the heat treatment change model stored in the heat treatment change model storing unit represents a relationship between a change of a temperature in the processing chamber for each of the zones and a change of a heat treatment result for each of the zones, and

the optimum temperature calculating unit calculates an optimum temperature for each of the zones.

4. The heat treatment system of claim 1, wherein the heat treatment content is a film formation processing, and

the heat treatment result is a film thickness of a thin film formed on the workpiece.

5. A heat treatment method comprising:

heating an inside of a processing chamber in which a plurality of workpieces are accommodated;

storing a heat treatment condition according to a heat treatment content, including a temperature in the processing chamber heated by the heating;

storing a heat treatment change model that represents a relationship between a change of a temperature in the processing chamber and a change of a heat treatment result;

performing the heat treatment condition stored in the storing of the heat treatment condition;

receiving a result of the heat treatment performed by the heat treatment performing unit; and

calculating a target heat treatment result for an in-plane shape of the workpiece, based on a target heat treatment result and information about a shape of the target heat treatment result, and calculating an optimum temperature that results in the target heat treatment result, based on the calculated target heat treatment result for the in-plane shape and the heat treatment change model stored in the heat treatment change model storing unit.

6. A non-transitory computer-readable storage medium that stores a program which, when executed, causes a computer to function as:

a heating unit configured to heat an inside of a processing chamber in which a plurality of workpieces are accommodated;

a heat treatment condition storing unit configured to store a heat treatment condition according to a heat treatment content, including a temperature in the processing chamber heated by the heating unit;

a heat treatment change model storing unit configured to store a heat treatment change model that represents a relationship between a change of a temperature in the processing chamber and a change of a heat treatment result;

a heat treatment performing unit configured to perform the heat treatment condition stored by the heat treatment condition storing unit;

a heat treatment result receiving unit configured to receive a result of the heat treatment performed by the heat treatment performing unit; and

an optimum temperature calculating unit configured to calculate a target heat treatment result for an in-plane shape of the workpiece, based on a target heat treatment result and information about a shape of the target heat treatment result, and calculate an optimum temperature that results in the target heat treatment result, based on the calculated target heat treatment result for the in-plane shape and the heat treatment change model stored in the heat treatment change model storing unit.