Multiple Integrated Tips Scanning Probe Microscope

• US 20160252545A1
• Filed: 02/26/2016
• Published: 09/01/2016
• Est. Priority Date: 02/26/2015
• Status: Abandoned Application

• Current Assignee: Xallent LLC
• Original Assignee: Xallent LLC
• Inventors: Amponsah, Kwame
• Application Number:
  US15/054,382
• Publication Number:
  US 20160252545A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01Q 10/045 Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 30/025 Optical microscopes coupled with SPM
• CPC Class Codes: G01Q 60/04 STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 60/30 Scanning potential microscopy
• CPC Class Codes: G01Q 70/06 Probe tip arrays

Abstract

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

Claims

1. A scanning probe adapter comprising:

a probe head having at least one probe tip; and

an optical microscope configured to view the probe head in relation to a sample.

2. The scanning probe adapter of claim 1, wherein the probe head is mounted on a stage configured to align the at least one probe tip relative to a sample.

3. The scanning probe adapter of claim 1, wherein the probe head is mounted above a piezoelectric sample stage configured to move the sample in at least two axes and further configured to move the sample past the probe for scanning.

4. The scanning probe adapter of claim 3, wherein the piezoelectric stage is mounted onto a rotating stage configured to orient the sample in a particular direction.

5. The scanning probe adapter of claim 2, wherein, the stage is mounted onto:

(i) a first stage configured to move the stage along a first, X axis;

(ii) a second stage configured to move the stage along a second, Y axis; and

(iii) a third stage configured to move the stage along a third, Z axis.

7. The scanning probe adapter of claim 1, wherein the probe head comprises a top component and a bottom component.

8. The scanning probe adapter of claim 1, wherein a probe comprising the probe tips is affixed to the probe head.

9. The scanning probe adapter of claim 1, wherein a probe comprising the probe tips is affixed to a board component, and said board component is affixed to the probe head.

10. The scanning probe adapter of claim 1, wherein said probe head houses at least one transimpedance amplifier.

11. The scanning probe adapter of claim 1, wherein said probe head houses at least one spring loaded pogo pin, wherein said spring loaded pogo pin is configured to push against and make electrical contact to a board component or a probe comprising the probe tips.

12. A method of attaching a probe head to a scanning probe microscope, the method comprising the steps of:

removing an existing probe head of the scanning probe microscope; and

mounting a probe head according to claim 1 above a sample stage of the scanning probe microscope.

13. A method of attaching a probe head to a three-dimensional microscope, the method comprising the steps of:

placing a sample stage under the three-dimensional microscope, wherein the sample stage is configured to move the sample in at least two axes; and

mounting a probe head according to claim 1 relative to the sample stage.

14. The method of claim 13, wherein the three-dimensional microscope is an optical microscope, a scanning electron microscope, or a transmission electron microscope.

15. A method of operating a scanning probe microscope, the method comprising the steps of:

providing a probe with at least one tip, the probe comprising at least one monolithically integrated actuator and sensor, wherein the monolithically integrated actuator is configured to actuate and oscillate the probe tip; and

measuring, using the monolithically integrated sensor, a motion of the oscillating probe tip.

16. The method of claim 15, wherein said at least one monolithically integrated actuator and sensor is capacitive, piezoelectric, piezoresistive, or a combination of capacitive, piezoelectric, and piezoresistive.

17. A method of aligning at least two probe tips in a scanning probe adapter, the method comprising the steps of:

providing a probe head comprising at least two probe tips;

biasing a sample and the at least two probe tips with either an AC or DC signal;

moving, using a sample stage, the sample and the at least two probe tips into proximity;

measuring a current from each of the at least two probe tips;

comparing the measured currents to determine which, if any, of the at least two probe tips generated a higher current; and

if one of the at least two probe tips generated a higher current, retracting the sample stage and rotating the probe head away from whichever of the at least two probe tips generated the highest current, or determining that the at least two probe tips are aligned if equivalent currents are measured from the at least two probe tips.

18. The method of claim 17, further comprising the step of repeating the method until equivalent currents are measured from the at least two probe tips.

19. A method of aligning at least two probe tips in a scanning probe adapter, the method comprising the steps of:

providing a probe head comprising at least two probe tips;

moving the sample and the at least two probe tips into proximity;

capturing, using an optical microscope, an image of the at least two probe tips and a corresponding reflection of the at least two probe tips;

tracking, using an image recognition algorithm, an outer line shape of the at least two probe tips and the corresponding reflections;

calculating a distance between an apex each of the at least two probe tips and the apex of the corresponding reflection;

comparing the calculated distances to determine which, if any, of the at least two probe tips had a shorter calculated distance; and

if one of the at least two probe tips had a shorter calculated distance, rotating the probe head away from whichever of the at least two probe tips had the shorter calculated distance, or determining that the at least two probe tips are aligned if equivalent distances are calculated for each of the at least two probe tips.

20. The method of claim 19, further comprising the step of repeating the method until equivalent distances are calculated from the at least two probe tips.

21. A method for characterizing a sample using a scanning probe adapter, the method comprising:

providing a probe head comprising at least two probe tips;

aligning the at least two probe tips;

scanning the sample with at least one of the at least two probe tips to obtain a first measurement; and

performing at least one of storing the obtained first measurement, transmitting the obtained first measurement, and displaying the obtained first measurement.

22. The method of claim 21, further comprising the steps of:

contacting the sample with at least one of the at least two probe tips to obtain a second measurement; and

performing at least one of storing the obtained second measurement, transmitting the obtained second measurement, or displaying the obtained second measurement.

23. The method of claim 22, wherein the second measurement is an electrical measurement, a mechanical measurement, an optical measurement, or a chemical measurement.