METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
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Abstract
A method of metrology target design is described. The method includes determining a sensitivity of a parameter for a metrology target design to an optical aberration, determining the parameter for a product design exposed using an optical system of a lithographic apparatus, and determining an impact on the parameter of the metrology target design based on the parameter for the product design and the product of the sensitivity and one or more of the respective aberrations of the optical system.
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Citations
38 Claims
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1-18. -18. (canceled)
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19. A system of metrology target structure design, the system comprising:
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a hardware processing unit; a non-transitory computer readable medium comprising instructions executable by the hardware processing unit to; determine a value of a sensitivity of a parameter of a design of a metrology target structure to each respective aberration of a plurality of aberrations, wherein the metrology target structure is used for metrology in the manufacture of physical devices; and determine an impact of the metrology target structure design on the parameter based on a sum of values that are equivalent to the values of the sensitivities multiplied by values of respective aberrations of an optical system of a lithographic apparatus used to expose the metrology target structure. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method of metrology target structure design, the method comprising:
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determining a value of a sensitivity of a parameter pertaining to a design of a metrology target structure to each respective aberration of a plurality of aberrations, wherein the metrology target structure is used for metrology in the manufacture of physical devices; and determining, by a hardware computer system, an impact of the metrology target structure design on the parameter based on a sum of values that are equivalent to the values of the sensitivities multiplied by values of respective aberrations of an optical system of a lithographic apparatus used to expose the metrology target structure. - View Dependent Claims (30, 31, 32, 33, 34, 35)
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36. A non-transitory computer readable medium comprising instructions executable by a hardware computer to:
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determine a value of a sensitivity of a parameter pertaining to a design of a metrology target structure to each respective aberration of a plurality of aberrations, wherein the metrology target structure is used for metrology in the manufacture of physical devices; and determine an impact of the metrology target structure design on the parameter based on a sum of values that are equivalent to the values of the sensitivities multiplied by values of respective aberrations of an optical system of a lithographic apparatus used to expose the metrology target structure. - View Dependent Claims (37, 38)
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Specification