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COLUMNAR CRYSTAL CONTAINING LIGHT EMITTING ELEMENT AND METHOD OF MANUFACTURING THE SAME

  • US 20160254138A1
  • Filed: 05/13/2016
  • Published: 09/01/2016
  • Est. Priority Date: 08/31/2004
  • Status: Abandoned Application
First Claim
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1. A method of manufacturing a semiconductor element by forming, on a substrate, columnar crystals of a nitride-base or an oxide-base compound semiconductor, and by using thus-formed columnar crystals,wherein on a surface of said substrate, said columnar crystals are grown while ensuring anisotropy in a direction of c-axis, by controlling ratio of supply of Group-III atoms and nitrogen, or Group-II atoms and oxygen atoms, and temperature of crystal growth, so as to suppress crystal growth in a lateral direction on the surface of the substrate.

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