IMAGE SENSOR STRUCTURES FOR FINGERPRINT SENSING
First Claim
1. A method of making an optical biometric sensor, comprising:
- forming a collimator filter layer on an image sensor wafer, wherein a plurality of light collimating apertures in the collimator filter layer are aligned with a plurality of light sensing elements in the image sensor wafer; and
after forming the collimator filter layer on the image sensor wafer, singulating the image sensor wafer into a plurality of individual optical sensors.
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Abstract
Methods and systems for integrating image sensor structures with collimator filters, including manufacturing methods and associated structures for forming collimator filters at the wafer level for integration with image sensor semiconductor wafers. Methods of making an optical biometric sensor include forming a collimator filter layer on an image sensor wafer, wherein a plurality of light collimating apertures in the collimator filter layer are aligned with a plurality of light sensing elements in the image sensor wafer, and after forming the collimator filter layer on the image sensor wafer, singulating the image sensor wafer into a plurality of individual optical sensors.
64 Citations
37 Claims
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1. A method of making an optical biometric sensor, comprising:
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forming a collimator filter layer on an image sensor wafer, wherein a plurality of light collimating apertures in the collimator filter layer are aligned with a plurality of light sensing elements in the image sensor wafer; and after forming the collimator filter layer on the image sensor wafer, singulating the image sensor wafer into a plurality of individual optical sensors. - View Dependent Claims (2, 5, 6, 10, 12, 14, 15, 17, 19, 21, 22, 24, 30, 32)
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3. The method of claim 3, wherein the forming the plurality of light collimating apertures includes coating a light absorbing material on sidewalls of the light collimating apertures in the one or more redistribution layers.
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33. An optical sensor wafer having a plurality of optical sensor devices for biometric sensing, comprising:
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an image sensor wafer comprising an array of light sensor devices; and a collimator filter layer disposed on the image sensor wafer, the collimator filter layer comprising an array of light collimating filter elements, wherein the array of light collimating aperture elements is aligned with the array of light sensing devices. - View Dependent Claims (34, 35, 36)
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37. (canceled)
Specification