COUPLING MECHANISM, SUBSTRATE POLISHING APPARATUS, METHOD OF DETERMINING POSITION OF ROTATIONAL CENTER OF COUPLING MECHANISM, PROGRAM OF DETERMINING POSITION OF ROTATIONAL CENTER OF COUPLING MECHANISM, METHOD OF DETERMINING MAXIMUM PRESSING LOAD OF ROTATING BODY, AND PROGRAM OF DETERMINING MAXIMUM PRESSING LOAD OF ROTATING BODY

• US 20160256976A1
• Filed: 01/26/2016
• Published: 09/08/2016
• Est. Priority Date: 01/30/2015
• Status: Active Grant

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: SHINOZAKI, Hiroyuki
• Granted Patent: US 9,849,557 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B24B 27/0084 the grinding wheel support being angularly adjustable
• CPC Class Codes: B24B 37/005 Control means for lapping machines or devices
• CPC Class Codes: B24B 37/105 the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: B24B 53/12 Dressing tools; Holders therefor
• CPC Class Codes: B24D 7/16 Bushings; Mountings

Abstract

A coupling mechanism which enables a rotating body to follow an undulation of a polishing surface without generating flutter or vibration of the rotating body, and can finely control a load on the rotating body on a polishing surface in a load range which is smaller than the gravity of rotating body is disclosed. The coupling mechanism includes an upper spherical bearing and a lower spherical bearing disposed between a drive shaft and the rotating body. The upper spherical bearing has a first concave contact surface and a second convex contact surface which are in contact with each other, and the lower spherical bearing has a third concave contact surface and a fourth convex contact surface which are in contact with each other. The first concave contact surface and the second convex contact surface are located above the third concave contact surface and the fourth convex contact surface. The first concave contact surface, the second convex contact surface, the third concave contact surface, the fourth convex contact surface are arranged concentrically.

Claims

1. A coupling mechanism for tiltably coupling a rotating body to a drive shaft, comprising:

an upper spherical bearing and a lower spherical bearing disposed between the drive shaft and the rotating body,

wherein the upper spherical bearing includes a first sliding-contact member and a second sliding-contact member which are sandwiched between the drive shaft and the rotating body,

the first sliding-contact member has a first concave contact surface, and the second sliding-contact member has a second convex contact surface which is in contact with the first concave contact surface,

the lower spherical bearing includes a third sliding-contact member attached to the drive shaft, and a fourth sliding-contact member attached to the rotating body,

the third sliding-contact member has a third concave contact surface, and the fourth sliding-contact member has a fourth convex contact surface which is in contact with the third concave contact surface,

the first concave contact surface and the second convex contact surface are located above the third concave contact surface and the fourth convex contact surface, and

the first concave contact surface, the second convex contact surface, the third concave contact surface, and the fourth convex contact surface are arranged concentrically.

2. The coupling mechanism according to claim 1, wherein each of the first concave contact surface and the second convex contact surface has a shape of a part of an upper half of a spherical surface having a first radius, and

each of the third concave contact surface and the fourth convex contact surface has a shape of a part of an upper half of a spherical surface having a second radius which is smaller than the first radius.

3. The coupling mechanism according to claim 1, wherein the upper spherical bearing and the lower spherical bearing have a same rotational center, and the rotational center is located below the first concave contact surface, the second convex contact surface, the third concave contact surface, and the fourth convex contact surface.

4. The coupling mechanism according to claim 3, wherein a distance from a bottom end surface of the rotating body to the rotational center can be changed by selecting radii of curvature of the first concave contact surface, the second convex contact surface, the third concave contact surface, and the fourth convex contact surface.

5. The coupling mechanism according to claim 3, wherein the rotational center is located on a bottom end surface of the rotating body.

6. The coupling mechanism according to claim 3, wherein the rotational center coincides with a center of inertia of a displacement portion which can tilt about the rotational center.

7. The coupling mechanism according to claim 3, wherein the rotational center is located between a bottom end surface of the rotating body and a center of inertia of a displacement portion which can tilt about the rotational center.

8. The coupling mechanism according to claim 3, wherein the rotational center is located below a bottom end surface of the rotating body.

9. The coupling mechanism according to claim 1, wherein one of the first sliding-contact member and the second sliding-contact member has a Young'"'"'s modulus which is equal to or lower than a Young'"'"'s modulus of the other, or has a damping coefficient which is higher than a damping coefficient of the other.

14. A substrate polishing apparatus comprising:

a polishing table for supporting a polishing pad; and

a polishing head configured to press a substrate against the polishing pad,

wherein the polishing head is coupled to a drive shaft through the coupling mechanism according to claim 1.

15. A substrate polishing apparatus comprising:

a polishing table for supporting a polishing pad;

a polishing head configured to press a substrate against the polishing pad; and

a dresser which is pressed against the polishing pad,

wherein the dresser is coupled to a drive shaft through the coupling mechanism according to claim 1.

16. The substrate polishing apparatus according to claim 15, further comprising:

a pad-height measuring device configured to measure a height of a polishing surface of the polishing pad,

wherein the pad-height measuring device includes;

a pad-height sensor secured to a dresser arm which rotatably supports the drive shaft; and

a sensor target secured to the drive shaft.

10. A coupling mechanism for tiltably coupling a rotating body to a drive shaft, comprising:

a damping member disposed between the drive shaft and the rotating body,

wherein the damping member is attached to both a lower end of the drive shaft and the rotating body, and

the damping member has a Young'"'"'s modulus which is equal to or lower than a Young'"'"'s modulus of the drive shaft, or has a damping coefficient which is higher than a damping coefficient of the drive shaft.

11. The coupling mechanism according to claim 10, wherein the damping member has the Young'"'"'s modulus in a range of 0.1 GPa to 210 GPa, or has the damping coefficient such that a damping ratio is in a range of 0.1 to 0.8.

12. The coupling mechanism according to claim 10, wherein the damping member is a rubber bush.

13. The coupling mechanism according to claim 10, wherein the damping member is a damping ring in an annular shape.

17. A method of determining a position of a rotational center of a coupling mechanism which includes an upper spherical bearing and a lower spherical bearing having a same rotational center and tiltably couples a rotating body to a drive shaft, comprising:

specifying an equation of motion for a tilting motion of a displacement portion which can tilt about the rotational center when the rotating body is in sliding contact with a polishing pad supported by a rotating polishing table, while rotating the rotating body;

specifying a stability condition expression for the tilting motion for preventing flutter or vibration of the rotating body, based on the equation of motion for the tilting motion;

calculating a range of a position of the rotational center for preventing the flutter or vibration of the rotating body, based on the stability condition expression for the tilting motion; and

determining the position of the rotational center which falls within the calculated range.

18. The method of determining the position of the rotational center according to claim 17, wherein said determining comprises, if a center of inertia of the displacement portion falls within the calculated range, determining the position of the rotational center which coincides with the center of inertia.

19. A program of determining a position of a rotational center of a coupling mechanism which includes an upper spherical bearing and a lower spherical bearing having a same rotational center and tiltably couples a rotating body to a drive shaft, the program causing a computer to perform operations of:

calculating a range of the position of the rotational center for preventing flutter or vibration of the rotating body, from a stability condition expression for a tilting motion, which is specified based on an equation of motion for the tilting motion of a displacement portion which can tilt about the rotational center when the rotating body is in sliding contact with a polishing pad supported by a rotating polishing table, while rotating the rotating body; and

determining the position of the rotational center which falls within the calculated range.

20. The program of determining the position of the rotational center according to claim 19, wherein causing the computer to perform an operation of said determining comprises causing the computer to perform an operation of, if a center of inertia of the displacement portion falls within the calculated range, determining the position of the rotational center which coincides with the center of inertia.

21. A method of determining a maximum pressing force of a rotating body which is tiltably coupled to a drive shaft through a coupling mechanism which includes an upper spherical bearing and a lower spherical bearing having a same rotational center, comprising:

specifying an equation of motion for a translational motion and an equation of motion for a tilting motion of a displacement portion which can tilt about the rotational center when the rotating body is in sliding contact with a polishing pad supported by a rotating polishing table, while rotating the rotating body;

specifying a stability condition expression for the translational motion for preventing flutter or vibration of the rotating body, based on the equation of motion for the translational motion;

specifying a stability condition expression for the tilting motion for preventing flutter or vibration of the rotating body, based on the equation of motion for the tilting motion;

calculating a critical value of a pressing load in the translational motion, based on the stability condition expression for the translational motion;

calculating a critical value of a pressing load in the tilting motion, based on the stability condition expression for the tilting motion;

comparing the critical value of the pressing load in the translational motion with the critical value of the pressing load in the tilting motion;

if the critical value of the pressing load in the translational motion is smaller than or equal to the critical value of the pressing load in the tilting motion, determining that the critical value of the pressing load in the translational motion is the maximum pressing load of the rotating body; and

if the critical value of the pressing load in the translational motion is larger than the critical value of the pressing load in the tilting motion, determining that the critical value of the pressing load in the tilting motion is the maximum pressing load of the rotating body.

22. A program of determining a maximum pressing load of a rotating body which is tiltably coupled to a drive shaft through a coupling mechanism which includes an upper spherical bearing and a lower spherical bearing having a same rotational center,

the program causing a computer to perform operations of:

calculating a critical value of a pressing load in a translational motion, which can prevent flutter or vibration of the rotating body, from a stability condition expression for the translational motion which is specified based on an equation of motion for the translational motion of a displacement portion which can tilt about the rotational center when the rotating body is in sliding contact with a polishing pad supported by a rotating polishing table, while rotating the rotating body;

calculating a critical value of a pressing load in a tilting motion, which can prevent flutter or vibration of the rotating body, from a stability condition expression for the tilting motion which is specified based on an equation of motion for the tilting motion of the displacement portion when the rotating body is in sliding contact with the polishing pad supported by the rotating polishing table, while rotating the rotating body;

comparing the critical value of the pressing load in the translational motion with the critical value of the pressing load in the tilting motion;

if the critical value of the pressing load in the translational motion is smaller than or equal to the critical value of the pressing load in the tilting motion, determining that the critical value of the pressing load in the translational motion is the maximum pressing load of the rotating body; and

if the critical value of the pressing load in the translational motion is larger than the critical value of the pressing load in the tilting motion, determining that the critical value of the pressing load in the tilting motion is the maximum pressing load of the rotating body.