PURIFICATION OF A METALLOID BY CONSUMABLE ELECTRODE VACUUM ARC REMELT PROCESS
First Claim
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1. A CEVAR furnace system for producing a purified silicon ingot from a silicon electrode, the CEVAR furnace system comprising:
- a silicon electrode heating apparatus for preheating the silicon electrode to form a preheated silicon electrode;
a gas-tight CEVAR furnace chamber;
a short CEVAR open-bottomed crucible for containment of an arc zone from a CEVAR purification process melting the preheated silicon electrode, the short CEVAR open-bottomed crucible disposed in the gas-tight CEVAR furnace chamber;
a preheated silicon electrode drive system for lowering the preheated silicon electrode within the short CEVAR open-bottomed crucible as a lower end of the preheated silicon electrode melts in the CEVAR purification process;
an ingot heating apparatus disposed adjacent to the open bottom of the short CEVAR open-bottomed crucible through which the purified silicon ingot formed in the CEVAR purification process passes;
an ingot heating controller for controlling the ingot heating apparatus to provide a temperature-controlled thermal environment for the purified silicon ingot passing through the ingot heating apparatus; and
an ingot withdrawal drive system for alternatively withdrawing the purified silicon ingot from the short CEVAR open-bottomed crucible at a vertical growth rate of the purified silicon ingot during steady state of the CEVAR purification process or raising the short CEVAR open-bottomed crucible, the silicon electrode and the ingot heating apparatus at the vertical growth rate of the purified silicon ingot during steady state of the CEVAR purification process.
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Abstract
A metalloid such as silicon in the form of a preheated solid electrode is purified by a CEVAR purification process by producing an ingot with controlled heating and cool down after the preheated electrode is melted in a CEVAR furnace system using a short CEVAR open-bottomed crucible.
62 Citations
20 Claims
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1. A CEVAR furnace system for producing a purified silicon ingot from a silicon electrode, the CEVAR furnace system comprising:
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a silicon electrode heating apparatus for preheating the silicon electrode to form a preheated silicon electrode; a gas-tight CEVAR furnace chamber; a short CEVAR open-bottomed crucible for containment of an arc zone from a CEVAR purification process melting the preheated silicon electrode, the short CEVAR open-bottomed crucible disposed in the gas-tight CEVAR furnace chamber; a preheated silicon electrode drive system for lowering the preheated silicon electrode within the short CEVAR open-bottomed crucible as a lower end of the preheated silicon electrode melts in the CEVAR purification process; an ingot heating apparatus disposed adjacent to the open bottom of the short CEVAR open-bottomed crucible through which the purified silicon ingot formed in the CEVAR purification process passes; an ingot heating controller for controlling the ingot heating apparatus to provide a temperature-controlled thermal environment for the purified silicon ingot passing through the ingot heating apparatus; and an ingot withdrawal drive system for alternatively withdrawing the purified silicon ingot from the short CEVAR open-bottomed crucible at a vertical growth rate of the purified silicon ingot during steady state of the CEVAR purification process or raising the short CEVAR open-bottomed crucible, the silicon electrode and the ingot heating apparatus at the vertical growth rate of the purified silicon ingot during steady state of the CEVAR purification process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A CEVAR furnace system for producing a purified silicon ingot from a silicon electrode, the CEVAR furnace system comprising:
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a gas-tight CEVAR furnace chamber; a silicon electrode heating apparatus disposed within the gas-tight CEVAR furnace chamber for preheating the silicon electrode to form a preheated silicon electrode; a short CEVAR open-bottomed crucible for containment of an arc zone from a CEVAR purification process melting the preheated silicon electrode, the short CEVAR open-bottomed crucible disposed in the gas-tight CEVAR furnace chamber; a preheated silicon electrode drive system for lowering the preheated silicon electrode within the short CEVAR open-bottomed crucible as a lower end of the preheated silicon electrode melts in the CEVAR purification process; an ingot heating apparatus disposed adjacent to the open bottom of the short CEVAR open-bottomed crucible through which the purified silicon ingot formed in the CEVAR purification process passes; an ingot heating controller for controlling the ingot heating apparatus to provide a temperature-controlled thermal environment for the purified silicon ingot passing through the ingot heating apparatus; and an ingot withdrawal drive system for alternatively withdrawing the purified silicon ingot from the short CEVAR open-bottomed crucible at a vertical growth rate of the purified silicon ingot during a steady state of the CEVAR purification process or raising the short CEVAR open-bottomed crucible, the silicon electrode and the ingot heating apparatus at the vertical growth rate of the purified silicon ingot during the steady state of the CEVAR purification process. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification