BULK ACOUSTIC WAVE ACCELEROMETERS
First Claim
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1. An accelerometer, comprising:
- a resonator element configured to vibrate along a first axis in a bulk acoustic wave mode at a resonant frequency; and
at least one electrode coupled to the resonator element to excite the resonator element to vibrate along the first axis in the bulk acoustic wave mode at the resonant frequency, and to detect a measurement signal.
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Abstract
Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.
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Citations
21 Claims
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1. An accelerometer, comprising:
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a resonator element configured to vibrate along a first axis in a bulk acoustic wave mode at a resonant frequency; and at least one electrode coupled to the resonator element to excite the resonator element to vibrate along the first axis in the bulk acoustic wave mode at the resonant frequency, and to detect a measurement signal. - View Dependent Claims (2, 3, 4)
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5. An accelerometer, comprising:
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a resonator element having a resonant frequency of at least about 1 MHz, the resonator element being configured to vibrate along a first axis; and at least one electrode coupled to the resonator element to excite the resonator element to vibrate along the first axis at the resonant frequency, and to detect a measurement signal. - View Dependent Claims (6, 7, 8, 9)
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10. A method of measuring motion using an electromechanical resonator having a resonant frequency and an electrical spring constant, the electromechanical resonator comprising a resonator element, the method comprising:
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driving the resonator element to vibrate along a first axis at the resonant frequency; and measuring motion along the first axis based on a change in the electrical spring constant of the electromechanical resonator. - View Dependent Claims (11, 12, 13, 14, 19)
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15. A accelerometer for measuring motion in any of a plurality of axes comprising an x-axis, a y-axis, and a z-axis, the accelerometer comprising:
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a substrate defining a plane of the x-axis and the y-axis; a proof mass suspended above the substrate by a suspension system, the suspension system comprising; at least one first suspension member configured to allow motion of the proof mass along the z-axis; and at least one second suspension member configured to allow motion of the proof mass along the x-axis and/or the y-axis, the at least one second suspension member being mechanically connected to the at least one first suspension member, wherein the at least one second suspension member is suspended from the at least one first suspension member. - View Dependent Claims (16, 17, 18, 20, 21)
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Specification