THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, DISPLAY SUBSTRATE AND DISPLAY DEVICE
First Claim
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1. A method of manufacturing a thin film transistor, comprising:
- forming an active layer having characteristics of crystal orientation of C-axis on a substrate by using indium gallium zinc oxide (InGaO3(ZnO)m), where m≧
2.
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Abstract
A thin film transistor and a manufacturing method thereof, a display substrate and a display device are provided. The method of manufacturing the thin film transistor comprises forming an active layer (4) having characteristics of crystal orientation of C-axis on a substrate (1) by using indium gallium zinc oxide (InGaO3(ZnO)m), where m≧2. The active layer fabricated with InGaO3(ZnO)m has a good electron mobility, and the quality of the fabricated active layer is improved.
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22 Claims
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1. A method of manufacturing a thin film transistor, comprising:
forming an active layer having characteristics of crystal orientation of C-axis on a substrate by using indium gallium zinc oxide (InGaO3(ZnO)m), where m≧
2.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
- 19. A thin film transistor, comprising an active layer provided on a substrate, wherein the active layer comprises indium gallium zinc oxide having characteristics of crystal orientation of C-axis, the indium gallium zinc oxide is InGaO3(ZnO)m, where m≧
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21. (canceled)
Specification