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DEFECT INSPECTION SYSTEM AND METHOD

  • US 20160266046A1
  • Filed: 10/13/2014
  • Published: 09/15/2016
  • Est. Priority Date: 10/24/2013
  • Status: Active Grant
First Claim
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1. A defect inspection system for manual visual inspection of surface defects in a sample, comprising:

  • a lighting system for illuminating the sample surface, comprising an array of light sources formed within a plane, wherein the array of light sources defines a range of illumination directions towards the sample within the plane, which range covers at least 90 degrees; and

    a controller for controlling the light sources in the array to gradually vary the intensity of the output of the light sources, wherein at respective points in time within a sequence each light source has a greater intensity than the others such that each point of the sample is illuminated, at the respective points in time within the sequence, with a light distribution having a maximum light source intensity in a single incident direction, and over time the direction in which the maximum light source intensity is provided changes to cover said range.

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