SYSTEM AND METHOD FOR SCANNING AN OBJECT
First Claim
1. A system for scanning an object, the system comprises:
- charged particles optics configured to;
scan, with a charged particle beam, a first region of interest (ROI) of an area of the object at a first scan rate;
detect first particles that were generated as a result of the scanning of the first ROI;
scan, with the charged particle beam, a second ROI of the area of the object at a second scan rate lower than the first scan rate, wherein the first ROI differs from the second ROI by at least one parameter; and
detect second particles that were generated as a result of the scanning of the second ROA; and
a processor that is configured to generate at least one image of the area in response to the first and second particles.
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Accused Products
Abstract
A system for scanning an object, the system may include (a) charged particles optics that is configured to: scan, with a charged particle beam and at a first scan rate, a first region of interest (ROI) of an area of the object; detect first particles that were generated as a result of the scanning of the first ROI; scan, with the charged particle beam and at a second scan rate, a second ROI of the area of the object; wherein the second scan rate is lower than the first scan rate; wherein first ROI differs from the second ROI by at least one parameter; detect second particles that were generated as a result of the scanning of the second ROA; and (b) a processor that is configured to generate at least one image of the area in response to the first and second particles.
3 Citations
15 Claims
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1. A system for scanning an object, the system comprises:
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charged particles optics configured to; scan, with a charged particle beam, a first region of interest (ROI) of an area of the object at a first scan rate; detect first particles that were generated as a result of the scanning of the first ROI; scan, with the charged particle beam, a second ROI of the area of the object at a second scan rate lower than the first scan rate, wherein the first ROI differs from the second ROI by at least one parameter; and detect second particles that were generated as a result of the scanning of the second ROA; and a processor that is configured to generate at least one image of the area in response to the first and second particles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for imaging an object, the method comprising:
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scanning, with a charged particle beam, a first region of interest (ROI) of an area of the object at a first scan rate; detecting first particles that were generated as a result of the scanning of the first ROI; scanning with the charged particle beam, a second ROI of the area of the object at a second scan rate lower than the first scan rate, wherein the first ROI differs from the second ROI by at least one parameter; detecting second particles that were generated as a result of the scanning of the second ROA; and generating at least one image of the area in response to the first and second particles. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification