GAS PERMEABLE WINDOW AND METHOD OF FABRICATING THE SAME

• US 20160279895A1
• Filed: 03/23/2016
• Published: 09/29/2016
• Est. Priority Date: 03/27/2015
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Marjanovic, Sasha, Piech, Garrett Andrew, Wieland, Kristopher Allen
• Granted Patent: US 10,525,657 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 2103/54 Glass
• CPC Class Codes: B23K 26/0624 using ultrashort pulses, i.e. pulses of 1ns or less
• CPC Class Codes: B23K 26/0652 comprising prisms
• CPC Class Codes: B23K 26/0732 into a rectangular shape
• CPC Class Codes: B23K 26/0738 into a linear shape
• CPC Class Codes: B23K 26/384 of specially shaped holes
• CPC Class Codes: B23K 26/389 of fluid openings, e.g. nozzles, jets laser machining of inkjet nozzles B41J2/1634
• CPC Class Codes: B29C 64/129 characterised by the energy source therefor, e.g. by global irradiation combined with a mask
• CPC Class Codes: B29C 64/245 Platforms or substrates support structures intended to be sacrificed after manufacture B29C64/40
• CPC Class Codes: B32B 17/06 comprising glass as the main or only constituent of a layer, next to another layer of a specific material
• CPC Class Codes: B32B 2307/412 Transparent
• CPC Class Codes: B32B 2307/724 Permeability to gases, adsorption
• CPC Class Codes: B32B 3/266 characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
• CPC Class Codes: B33Y 30/00 Apparatus for additive manufacturing; Details thereof or accessories therefor
• CPC Class Codes: C03C 23/0025 by a laser beam

Abstract

A gas permeable glass window, suitable for use with liquid interface additive manufacturing, has an optically transparent glass article greater than about 0.5 millimeters in thickness defining a first surface and a second surface. A plurality of gas channels are disposed through the article from the first surface to the second surface. The gas channels occupy less than about 1.0% of a surface area of the article and are configured such that the article has a gas permeability between about 10 barrers and about 2000 barrers.

Claims

1. A gas permeable glass window, comprising:

an optically transparent glass article greater than about 0.1 millimeters in thickness defining a first surface and a second surface; and

a plurality of gas channels disposed through the article from the first surface to the second surface, wherein the gas channels occupy less than about 1.0% of a surface area of the article and are configured such that the article has a gas permeability between about 10 barrers and about 2000 barrers.

2. The gas permeable window of claim 1, wherein the gas permeability is between about 100 barrers and about 500 barrers.

3. The gas permeable window of claim 2, wherein the gas channels occupy less than about 0.05% of the surface area of the article.

4. The gas permeable window of claim 1, wherein the glass article comprises a plurality of stacked glass sheets, each glass sheet having a plurality of holes extending therethrough, and further wherein the glass sheets are stacked such that the holes are substantially aligned to form the gas channels.

5. The gas permeable window of claim 1, wherein the gas channels are randomly distributed throughout the article and are spaced apart between about 5 microns and about 400 microns.

6. The gas permeable window of claim 5, wherein the gas channels have an aspect ratio of between about 10:

1 and about 12,000;

1.

7. The gas permeable window of claim 1, wherein the gas channels have a diameter between about 0.25 microns and about 50.0 microns and the gas permeability of the article is less than about 500 barrers.

8. The gas permeable window of claim 7, wherein the gas channels are disposed through the article at an angle between about 0°

to about 15°

relative to an axis orthogonal to the first and second surfaces.

9. The gas permeable window of claim 8, wherein the angle of the channels increases with an increasing distance from a central point.

10. A method of forming a gas permeable glass window, comprising:

providing an optically transparent glass article having a first surface and a second surface;

focusing a pulsed laser beam into a laser beam focal line, viewed along the beam propagation direction; and

forming a plurality of gas channels in the article by repeatedly directing the laser beam focal line into the optically transparent glass article at an angle of incidence to the first surface of the glass article, the laser beam focal line generating an induced absorption within the article, each induced absorption producing a gas channel along the laser beam focal line from the first surface to the second surface within the article, wherein the number and diameter of the gas channels is determined based on a desired gas permeability through the article.

11. The method of claim 10, wherein the pulse duration is less than about 15 picoseconds.

12. The method of claim 11, further comprising the step of enlarging the gas channels by applying an etching agent.

13. The method of claim 10, wherein the angle of incidence to the surface of the substrate is varied such that the gas channels are disposed through the article at an angle between about 0°

to about 15°

, the angle of the channels increasing with an increasing distance from a central point.

14. The method of claim 10, wherein the gas channels have an aspect ratio of between about 10:

1 and about 12,000;

1.

15. The method of claim 14, wherein the gas permeability of the article is between about 100 barrers to about 500 barrers.

16. A gas permeable window:

an optically transparent article defining a first surface and a second surface; and

a plurality of gas channels extending from the first surface to the second surface, wherein the gas channels are disposed at an angle between about 0°

to about 15°

relative to an axis orthogonal to the first and second surfaces, the angle of the channels increasing with an increasing distance from a central point.

17. The gas permeable window of claim 16, wherein the gas channels have an aspect ratio of between about 10:

1 and about 12,000;

1 and occupy less than about 0.01% of a surface area of the article.

18. The gas permeable window of claim 17, wherein the optically transparent article comprises a plurality of stacked transparent sheets, each sheet having a plurality of holes extending therethrough, and further wherein the transparent sheets are stacked such that the holes are substantially aligned to form the gas channels.

19. The gas permeable window of claim 18, wherein the gas permeability of the article is greater than about 100 barrers.

20. The gas permeable window of claim 19, wherein the optically transparent article comprises a glass having at least one ion-exchange region.