INTEGRATED OPTICAL NANOSCALE PROBE MEASUREMENT OF ELECTRIC FIELDS FROM ELECTRIC CHARGES IN ELECTRONIC DEVICES

• US 20160282427A1
• Filed: 06/10/2016
• Published: 09/29/2016
• Est. Priority Date: 02/19/2014
• Status: Active Grant

• Current Assignee: Infinitum Solutions, Inc.
• Original Assignee: Infinitum Solutions, Inc.
• Inventors: Heidmann, Juergen
• Granted Patent: US 9,778,329 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01N 21/6458 Fluorescence microscopy fluorescence microscopes per se G02B21/0076 and G02B21/16
• CPC Class Codes: G01N 21/6489 Photoluminescence of semiconductors
• CPC Class Codes: G01N 2201/0612 Laser diodes
• CPC Class Codes: G01N 24/10 by using electron paramagnetic resonance G01N24/12 takes precedence
• CPC Class Codes: G01Q 60/08 MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy
• CPC Class Codes: G01Q 70/14 Particular materials
• CPC Class Codes: G01R 33/26 using optical pumping
• CPC Class Codes: G01R 33/323 Detection of MR without the use of RF or microwaves, e.g. force-detected MR, thermally detected MR, MR detection via electrical conductivity, optically detected MR
• CPC Class Codes: G01R 33/60 using electron paramagnetic resonance G01R33/24, G01R33/62 take precedence
• CPC Class Codes: G11B 2005/0021 Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
• CPC Class Codes: G11B 5/012 Recording on, or reproducing or erasing from, magnetic disks G11B17/00, G11B19/00 take precedence
• CPC Class Codes: G11B 5/455 Arrangements for functional testing of heads; Measuring arrangements for heads

Abstract

A diamond probe is suitable to be attached to an Atomic Force Microscope and is created with a tip that incorporates a one or more Nitrogen Vacancy (NV) centers located near the end of the tip. The probe arm acts as an optical waveguide to propagate the emission from the NV center with high efficiency and a beveled end directs excitation light to the NV center and directs photoluminescence light emanating from the NV center into the probe arm. The probe tip is scanned over an area of a sample with an electric charge, such as a field effect transistor or flash memory. Optically Detected Spin Resonance (ODMR) is measured as the probe tip is scanned over the area of the sample, from which a characteristic of the area of the sample with the electric charge may be determined.

Claims

1. A method comprising:

providing an electric charge in an area of a sample;

scanning a probe having a probe tip comprising at least one nitrogen vacancy center over the area of the sample with the electric charge;

providing an excitation radio frequency (RF) field to the at least one nitrogen vacancy center;

producing excitation illumination that is incident on the at least one nitrogen vacancy center;

measuring Optically Detected Spin Resonance (ODMR) as the probe tip is scanned over the area of the sample with the electric charge by detecting a decrease in a spin dependent photoluminescence in response to the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center; and

determining a characteristic of the area of the sample with the electric charge using the ODMR.

2. The method of claim 1, wherein the sample is an integrated circuit device.

3. The method of claim 1, wherein the characteristic of the area of the sample with the electric charge comprises at least one of an electric field distribution of the electric charge and a width of the area of the sample with the electric charge.

4. The method of claim 1, wherein scanning the probe having the probe tip over the area of the sample with the electric charge comprises scanning the probe tip in two dimensions over the area of the sample with the electric charge.

5. The method of claim 1, wherein an amplitude and frequency of the excitation RF field provided to the at least one nitrogen vacancy center is constant as the probe tip is scanned over the area of the sample with the electric charge.

6. The method of claim 1, wherein scanning the probe having the probe tip over the area of the sample with the electric charge comprises moving the probe tip to a plurality of locations over the area of the sample with the electric charge and temporarily holding the probe tip stationary at each location of the plurality of locations;

wherein the excitation RF field provided to the at least one nitrogen vacancy center is varied at each location of the plurality of locations while the probe tip is temporarily held stationary; and

wherein the determining the characteristic of the area of the sample with the electric charge comprises determining a resonance frequency using the ODMR.

7. The method of claim 1, wherein the electric charge is a static electric charge.

8. The method of claim 1, wherein the electric charge is dynamically changing and wherein the excitation RF field is produced by a dynamically changing magnetic field in the sample produced by the electric charge that is dynamically changing.

9. The method of claim 8, wherein the electric charge is dynamically changing by moving through the area of the sample to produce a current in the area of the sample.

10. The method of claim 9, wherein the current is an alternating current.

11. The method of claim 10, wherein determining the characteristic of the area of the sample with the electric charge using the ODMR comprises:

detecting a Rabi oscillation of the at least one nitrogen vacancy center, the Rabi oscillation having a Rabi frequency;

determining an amplitude of a magnetic field produced by the alternating current using the Rabi frequency.

12. The method of claim 11, wherein the providing an electrical charge, the producing the excitation illumination, and the measuring ODMR comprises:

producing a plurality of sequences including producing a pulse of pump illumination that is incident on the at least one nitrogen vacancy center followed by producing a pulse of the alternating current followed by producing a pulse of the excitation illumination that is incident on the at least one nitrogen vacancy center and measuring the spin dependent photoluminescence in response to the pulse of the excitation illumination;

wherein different durations of the pulse of the alternating current is used in each sequence;

wherein detecting the Rabi oscillation comprises using the spin dependent photoluminescence measured at the different durations of the pulse of the alternating current.

13. The method of claim 1, wherein the probe tip comprises a crystal particle and the at least one nitrogen vacancy center is in the crystal particle, further comprising:

focusing the excitation illumination on the crystal particle; and

receiving the spin dependent photoluminescence from the at least one nitrogen vacancy center with a microscope.

14. The method of claim 1, wherein the probe comprises a crystal arm and the probe tip is at a first end of the crystal arm and the at least one nitrogen vacancy center is in the probe tip.

15. The method of claim 14, wherein producing the excitation illumination that is incident on the at least one nitrogen vacancy center comprises introducing the excitation illumination at a second end of the crystal arm that is opposite the first end of the crystal arm, wherein the excitation illumination is guided via total internal reflection through the crystal arm and is reflected into the probe tip.

16. The method of claim 15, wherein introducing the excitation illumination at the second end of the crystal arm is performed without focusing the excitation illumination.

17. The method of claim 15, wherein introducing the excitation illumination at the second end of the crystal arm comprises one of transmitting or reflecting the excitation illumination into the crystal arm by a beam splitter that is directly connected to the second end of the crystal arm.

18. The method of claim 17, wherein measuring the ODMR by detecting the decrease in the spin dependent photoluminescence in response to the excitation illumination caused by ESR of the at least one nitrogen vacancy center comprises detecting photoluminescence from the at least one nitrogen vacancy center with a detector that is physical connected to the beam splitter either directly or with a spectral filter disposed between the detector and the beam splitter.

19. The method of claim 15, wherein measuring the ODMR by detecting the decrease in the spin dependent photoluminescence in response to the excitation illumination caused by ESR of the at least one nitrogen vacancy center comprises detecting photoluminescence produced by the at least one nitrogen vacancy center in the probe tip and that is reflected into the crystal arm and extracted through the second end of the crystal arm.

20. The method of claim 19, wherein the spin dependent photoluminescence extracted through the second end of the crystal arm is detected without focusing the spin dependent photoluminescence.

21. The method of claim 19, wherein the spin dependent photoluminescence extracted through the second end of the crystal arm is reflected by the second end of the crystal arm to a detector, and wherein introducing the excitation illumination at the second end of the crystal arm comprises transmitting the excitation illumination into the crystal arm through the second end of the crystal arm.

22. The method of claim 14, wherein the excitation RF field is produced by a radio frequency antenna on the crystal arm.

23. The method of claim 1, wherein the ODMR is measured at varying excitation frequencies of the excitation RF field.

24. An apparatus comprising:

a biasing source configured to provide a bias signal;

a voltage source to provide a gate control voltage;

a probe card coupled to the biasing source and the voltage source and is configured to be connected to a sample to provide an electric charge in an area of the sample and to provide the gate control voltage;

a probe having a probe tip comprising at least one nitrogen vacancy center, the probe configured to scan the probe tip across the area of the sample with the electric charge;

a light source that produces excitation illumination that is incident on the at least one nitrogen vacancy center;

a detector configured to detect photoluminescence produced by the at least one nitrogen vacancy center in the probe tip; and

at least one processor coupled to the detector and configured to measure Optically Detected Spin Resonance (ODMR) as the probe tip is scanned over the area of the sample with the electric charge by detecting a decrease in a spin dependent photoluminescence in response to a received excitation radio frequency (RF) field and the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center; and

determine a characteristic of the area of the sample with the electric charge using the ODMR.

25. The apparatus of claim 24, wherein the sample is one of a Field Effect Transistor or Flash memory.

26. The apparatus of claim 24, wherein the characteristic of the area of the sample with the electric charge comprises at least one of an electric field distribution of the electric charge and a width of the area of the sample with the electric charge.

27. The apparatus of claim 24, wherein the probe is configured to scan the probe tip over the area of the sample with the electric charge in two dimensions.

28. The apparatus of claim 24, wherein an amplitude and frequency of the excitation RF field received by the at least one nitrogen vacancy center is constant as the probe tip is scanned over the area of the sample with the electric charge.

29. The apparatus of claim 24, wherein the probe is configured to scan the probe tip over the area of the sample with the electric charge by being configured to move the probe tip to a plurality of locations over the area of the sample with the electric charge and temporarily hold the probe tip stationary at each location of the plurality of locations;

wherein the excitation RF field received by the at least one nitrogen vacancy center is varied at each location of the plurality of locations while the probe tip is temporarily held stationary; and

wherein the at least one processor is configured to determine the characteristic of the area of the sample with the electric charge by being configured to determine a resonance frequency using the ODMR.

30. The apparatus of claim 24, the apparatus further comprising a RF antenna that produces the excitation RF field received by the at least one nitrogen vacancy center, wherein the electric charge is a static electric charge.

31. The apparatus of claim 24, wherein the electric charge is dynamically changing and wherein the excitation RF field received by the at least one nitrogen vacancy center is produced by a dynamically changing magnetic field in the sample produced by the electric charge that is dynamically changing.

32. The apparatus of claim 31, wherein the electric charge is dynamically changing by moving through the area of the sample to produce a current in the area of the sample.

33. The apparatus of claim 32, wherein the current is an alternating current.

34. The apparatus of claim 33, wherein the at least one processor is configured to determine the characteristic of the area of the sample with the electric charge using the ODMR by being configured to:

detect a Rabi oscillation of the at least one nitrogen vacancy center, the Rabi oscillation having a Rabi frequency;

determine an amplitude of a magnetic field produced by the alternating current using the Rabi frequency.

35. The apparatus of claim 34, wherein the at least one processor is further configured to:

produce a plurality of sequences including produce a pulse of pump illumination that is incident on the at least one nitrogen vacancy center followed by producing a pulse of the alternating current followed by producing a pulse of the excitation illumination that is incident on the at least one nitrogen vacancy center and measuring the spin dependent photoluminescence in response to the pulse of the excitation illumination;

wherein different durations of the pulse of the alternating current is used in each sequence;

wherein the at least one processor is configured to detect the Rabi oscillation by being configured to use the spin dependent photoluminescence measured at the different durations of the pulse of the alternating current to detect the Rabi oscillation.

36. The apparatus of claim 24, wherein the probe tip comprises a crystal particle and the at least one nitrogen vacancy center is in the crystal particle, further comprising:

at least one lens configured to focus the excitation illumination on the probe tip and to project photoluminescence produced by the at least one nitrogen vacancy center on the detector.

37. The apparatus of claim 24, wherein the probe comprises a crystal arm and the probe tip is at a first end of the crystal arm and the at least one nitrogen vacancy center is in the probe tip.

38. The apparatus of claim 37, wherein the excitation illumination from the light source is introduced into a second end of the crystal arm that is opposite the first end of the crystal arm, wherein the excitation illumination is guided via total internal reflection through the crystal arm, and wherein the crystal arm is configured to reflect the excitation illumination into the probe tip.

39. The apparatus of claim 38, wherein the excitation illumination from the light source is introduced into the second end of the crystal arm without focusing optics to focus the excitation illumination.

40. The apparatus of claim 38, further comprising a beam splitter that is directly connected to the second end of the crystal arm, wherein the beam splitter transmits or reflects the excitation illumination from the light source into the crystal arm.

41. The apparatus of claim 40, wherein the detector is physical connected to the beam splitter either directly or with a spectral filter disposed between the detector and the beam splitter.

42. The apparatus of claim 38, wherein the crystal arm is configured to reflect the spin dependent photoluminescence produced by the at least one nitrogen vacancy center in the probe tip into the crystal arm and the spin dependent photoluminescence is guided via total internal reflection through the crystal arm and is extracted through the second end of the crystal arm.

43. The apparatus of claim 42, wherein the spin dependent photoluminescence extracted through the second end of the crystal arm is detected by the detector without intervening focusing optics.

44. The apparatus of claim 42, wherein the second end of the crystal arm is configured to reflect the spin dependent photoluminescence to the detector, and wherein the excitation illumination from the light source is introduced into the crystal arm by transmitting the excitation illumination through the second end of the crystal arm.

45. The apparatus of claim 37, the apparatus further comprising a RF antenna on the crystal arm that produces the excitation RF field received by the at least one nitrogen vacancy center.

46. The apparatus of claim 24, wherein the ODMR is measured at varying excitation frequencies of the excitation field.

47. A method comprising:

controlling a sample to produce a magnetic field;

scanning a probe having a probe tip comprising at least one nitrogen vacancy center through the magnetic field produced by the recording head;

producing excitation illumination that is incident on the at least one nitrogen vacancy center;

measuring Optically Detected Spin Resonance (ODMR) by detecting a decrease in a spin dependent photoluminescence in response to a received excitation radio frequency (RF) field and the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center; and

determining a characteristic of the recording head using the ODMR.

48. The method of claim 47, wherein the sample is a recording head that includes a write pole to produce the magnetic field and wherein the excitation RF field is produced by an external RF antenna.

49. The method of claim 47, wherein the sample is an is an integrated circuit device that produces a dynamically changing electric charge, and wherein the magnetic field is a dynamically changing magnetic field produced by the dynamically changing electric charge, and wherein the excitation RF field is produced by the dynamically changing magnetic field.