Device for Treating a Surface

• US 20160289836A1
• Filed: 11/07/2014
• Published: 10/06/2016
• Est. Priority Date: 11/07/2013
• Status: Abandoned Application

• Current Assignee: Maan Research & Development B.V.
• Original Assignee: Maan Research & Development B.V.
• Inventors: Jansen, Andreas Willibrordus Maria, Snitjer, Johannes Schelto
• Application Number:
  US15/035,240
• Publication Number:
  US 20160289836A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B29C 59/14 by plasma treatment plasma tubes per se H01J
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45578 Elongated nozzles, tubes with holes
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: C23C 16/545 for coating elongated substrates
• CPC Class Codes: H01J 37/32348 Dielectric barrier discharge
• CPC Class Codes: H01J 37/32376 Scanning across large workpieces
• CPC Class Codes: H05H 1/2439 Surface discharges, e.g. air flow control

Abstract

The invention relates to a device for treating a surface by moving the device over the surface in a treatment direction, which device includes a number of treatment elements arranged in at least one row. The treatment elements within a row are parallel to each other. The longitudinal axis of each treatment element has at least, in use, a directional component parallel to the treatment direction.

Claims

1. A device for treating a surface by moving the device over the surface in a treatment direction comprising a number of treatment elements arranged in at least one row, wherein the treatment elements within a row are parallel to each other and wherein a longitudinal axis of each treatment element has at least, in use, a directional component parallel to the treatment direction.

2. The device according to claim 1, wherein the treatment elements are arranged in an imbricated way in the direction of the row.

3. The device according to claim 2, wherein the longitudinal axis of each treatment element is under an angle with the treatment direction and wherein the direction of the longitudinal axis of each treatment element differs from both the treatment direction and the direction of the at least one row.

4. The device according to claim 1, wherein the angle between the longitudinal axis of each treatment element and the treatment direction is equal to or larger than 0°

and smaller than 90°

.

5. The device according to claim 1, wherein the treatment elements are surface dielectric barrier discharge plasma heads having linear electrodes extending in a longitudinal direction of the elements.

6. The device according to claim 5, further comprising two triangular treatment elements each arranged at an end of the at least one row of treatment elements to obtain a rectangular treatment area.

7. The device according to claim 1, comprising at least two parallel rows of treatment elements, wherein the longitudinal axes of the elements of adjacent rows are mirrored relative to the direction of the rows.

8. The device according to claim 1, wherein adjacent rows are displaced in the longitudinal direction of the rows.

9. The device according to claim 8, wherein the displacement of adjacent rows equals a pitch between adjacent treatment elements divided by the number of rows.

10. The device according to claim 1, wherein a gap is provided between adjacent treatment elements for supplying a treatment gas between the treatment elements and the surface to be treated or for discharging a treatment gas therefrom.

11. The device according to claim 1, further comprising control means for separately controlling power of the treatment elements.

12. The device according to claim 1, further comprising a housing for accommodating the at least one row of treatment elements, wherein the housing has a gas inlet for providing a treatment gas to the treatment elements and a gas outlet for discharging the treatment gas from the treatment elements.

13. The device according to claim 1, wherein the treatment elements are elongate.

14. The device according to claim 2, wherein the angle between the longitudinal axis of each treatment element and the treatment direction is equal to or larger than 0°

and smaller than 90°

.

15. The device according to claim 2, wherein the treatment elements are surface dielectric barrier discharge plasma heads having linear electrodes extending in a longitudinal direction of the elements.

16. The device according to claim 2, comprising at least two parallel rows of treatment elements, wherein the longitudinal axes of the elements of adjacent rows are mirrored relative to the direction of the rows.

17. The device according to claim 2, wherein adjacent rows are displaced in the longitudinal direction of the rows.

18. The device according to claim 2, wherein a gap is provided between adjacent treatment elements for supplying a treatment gas between the treatment elements and the surface to be treated or for discharging a treatment gas therefrom.

19. The device according to claim 2, further comprising control means for separately controlling power of the treatment elements.

20. The device according to claim 2, further comprising a housing for accommodating the at least one row of treatment elements, wherein the housing has a gas inlet for providing a treatment gas to the treatment elements and a gas outlet for discharging the treatment gas from the treatment elements.