CONTROL METHOD FOR THE ACCERLATION OF A VACUUM PUMP, IN WHICH METHOD THE INPUT CURRENT OF THE CONTROL DEVICE IS LIMITED
First Claim
1. Control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device, in whichin a first acceleration phase, the input current of the control device increases up to a maximum value Is,max andin a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.
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Abstract
A control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device in which, in a first acceleration phase, the input current of the control device increases up to a maximum value Is,max and, in a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.
6 Citations
10 Claims
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1. Control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device, in which
in a first acceleration phase, the input current of the control device increases up to a maximum value Is,max and in a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.
Specification