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CONTROL METHOD FOR THE ACCERLATION OF A VACUUM PUMP, IN WHICH METHOD THE INPUT CURRENT OF THE CONTROL DEVICE IS LIMITED

  • US 20160290349A1
  • Filed: 11/13/2014
  • Published: 10/06/2016
  • Est. Priority Date: 11/14/2013
  • Status: Abandoned Application
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1. Control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device, in whichin a first acceleration phase, the input current of the control device increases up to a maximum value Is,max andin a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.

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