SENSOR INCLUDING MOVING MASSES AND MEANS FOR DETECTING RELATIVE MOVEMENTS OF THE MASSES
First Claim
1. A MEMS type inertial sensor comprising a support structure having at least a first seismic body and a second seismic body connected thereto by resilient means in order to be movable in a suspension plane, transducers for maintaining the seismic bodies in vibration and for determining movements of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conductor means, the sensor being wherein the transducers have electrodes secured respectively to the first seismic body and to the second seismic body, the electrodes being arranged to make it possible to measure directly movements of the seismic bodies relative to each other in the suspension plane, in at least two directions parallel to the suspension plane.
2 Assignments
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Accused Products
Abstract
A MEMS type inertial sensor comprising a support structure having at least a first seismic body and a second seismic body connected thereto by resilient means in order to be movable in a suspension plane, transducers for maintaining the seismic bodies in vibration and for determining movements of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conductor means. The transducers comprise at least one electrode secured to the first seismic body and at least one electrode secured to the second seismic body, the two electrodes being arranged to enable relative movements of the seismic bodies relative to each other in the suspension plane to be measured directly.
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Citations
7 Claims
- 1. A MEMS type inertial sensor comprising a support structure having at least a first seismic body and a second seismic body connected thereto by resilient means in order to be movable in a suspension plane, transducers for maintaining the seismic bodies in vibration and for determining movements of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conductor means, the sensor being wherein the transducers have electrodes secured respectively to the first seismic body and to the second seismic body, the electrodes being arranged to make it possible to measure directly movements of the seismic bodies relative to each other in the suspension plane, in at least two directions parallel to the suspension plane.
Specification