ELECTRO-OPTICAL DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS

• US 20160291322A1
• Filed: 06/02/2016
• Published: 10/06/2016
• Est. Priority Date: 04/01/2015
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: ITO, Satoshi
• Granted Patent: US 10,001,642 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

In an electro-optical device, a torsion hinge and a mirror support post are formed as one piece together with a conductive member, and in the mirror support post, a first end portion on a substrate side is an open end which is opened toward the substrate. In the mirror support post, a second end portion on a mirror side is a flat plate which closes an opening of the mirror support post, and the mirror is in contact with a surface of the flat plate at a side opposite to the substrate. The first sacrificial layer which is used for manufacturing the electro-optical device is formed by exposure, development, and etching in a state in which a hard mask is formed, with respect to the photosensitive resin layer.

Claims

1. A method of manufacturing an electro-optical device comprising:

exposing and developing a photosensitive resin layer that is formed at a side of a substrate, etching the photosensitive resin layer in a state in which a hard mask that is configured by an inorganic material is formed, and forming a first sacrificial layer that includes a first opening and a columnar convex portion protruding toward a side opposite to the substrate;

forming a first conductive film on a side of the first sacrificial layer opposite to the substrate and on an internal side of the first opening;

patterning the first conductive film, and forming a first support post that is configured by the first conductive film formed on an internal side of the first opening, a torsion hinge that is formed as one piece together with the first support post, and a cylindrical second support post that protrudes toward a side opposite to the substrate from the torsion hinge and is formed as one piece together with the torsion hinge;

forming a second sacrificial layer on the torsion hinge and a side of the second support post opposite to the substrate;

planarizing the second sacrificial layer from a side opposite to the substrate to expose the second support post;

forming a second conductive film on a side of the second sacrificial layer opposite to the substrate;

forming a mirror by patterning the second conductive film; and

removing the first sacrificial layer and the second sacrificial layer.

2. The method of manufacturing an electro-optical device according to claim 1, wherein in the forming of the first sacrificial layer, the photosensitive resin layer is exposed and developed to be partially thin to form the convex portion, and the photosensitive resin layer is etched to form the first opening.

3. The method of manufacturing an electro-optical device according to claim 2, wherein, in the exposing and developing, exposing is performed using a half tone mask.

4. The method of manufacturing an electro-optical device according to claim 1, wherein, in the forming of the first sacrificial layer, the photosensitive resin layer is exposed and developed to form the first opening, and the photosensitive resin layer is etched to be partially thin to form the convex portion.

5. The method of manufacturing an electro-optical device according to claim 1, wherein a positive-type photosensitive resin layer is used as the photosensitive resin layer.

6. The method of manufacturing an electro-optical device according to claim 1, wherein a negative-type photosensitive resin layer is used as the photosensitive resin layer.