ELECTRO-OPTICAL DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS
First Claim
1. A method of manufacturing an electro-optical device comprising:
- exposing and developing a photosensitive resin layer that is formed at a side of a substrate, etching the photosensitive resin layer in a state in which a hard mask that is configured by an inorganic material is formed, and forming a first sacrificial layer that includes a first opening and a columnar convex portion protruding toward a side opposite to the substrate;
forming a first conductive film on a side of the first sacrificial layer opposite to the substrate and on an internal side of the first opening;
patterning the first conductive film, and forming a first support post that is configured by the first conductive film formed on an internal side of the first opening, a torsion hinge that is formed as one piece together with the first support post, and a cylindrical second support post that protrudes toward a side opposite to the substrate from the torsion hinge and is formed as one piece together with the torsion hinge;
forming a second sacrificial layer on the torsion hinge and a side of the second support post opposite to the substrate;
planarizing the second sacrificial layer from a side opposite to the substrate to expose the second support post;
forming a second conductive film on a side of the second sacrificial layer opposite to the substrate;
forming a mirror by patterning the second conductive film; and
removing the first sacrificial layer and the second sacrificial layer.
0 Assignments
0 Petitions
Accused Products
Abstract
In an electro-optical device, a torsion hinge and a mirror support post are formed as one piece together with a conductive member, and in the mirror support post, a first end portion on a substrate side is an open end which is opened toward the substrate. In the mirror support post, a second end portion on a mirror side is a flat plate which closes an opening of the mirror support post, and the mirror is in contact with a surface of the flat plate at a side opposite to the substrate. The first sacrificial layer which is used for manufacturing the electro-optical device is formed by exposure, development, and etching in a state in which a hard mask is formed, with respect to the photosensitive resin layer.
-
Citations
6 Claims
-
1. A method of manufacturing an electro-optical device comprising:
-
exposing and developing a photosensitive resin layer that is formed at a side of a substrate, etching the photosensitive resin layer in a state in which a hard mask that is configured by an inorganic material is formed, and forming a first sacrificial layer that includes a first opening and a columnar convex portion protruding toward a side opposite to the substrate; forming a first conductive film on a side of the first sacrificial layer opposite to the substrate and on an internal side of the first opening; patterning the first conductive film, and forming a first support post that is configured by the first conductive film formed on an internal side of the first opening, a torsion hinge that is formed as one piece together with the first support post, and a cylindrical second support post that protrudes toward a side opposite to the substrate from the torsion hinge and is formed as one piece together with the torsion hinge; forming a second sacrificial layer on the torsion hinge and a side of the second support post opposite to the substrate; planarizing the second sacrificial layer from a side opposite to the substrate to expose the second support post; forming a second conductive film on a side of the second sacrificial layer opposite to the substrate; forming a mirror by patterning the second conductive film; and removing the first sacrificial layer and the second sacrificial layer. - View Dependent Claims (2, 3, 4, 5, 6)
-
Specification