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PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

  • US 20160298964A1
  • Filed: 03/31/2016
  • Published: 10/13/2016
  • Est. Priority Date: 04/13/2015
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • an angular velocity detection element;

    an acceleration detection element;

    an acceleration detection signal wiring through which a detection signal of the acceleration detection element propagates; and

    a shield unit that is located between the angular velocity detection element and the acceleration detection signal wiring and is connected to a fixed potential.

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