PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
First Claim
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1. A physical quantity sensor comprising:
- an angular velocity detection element;
an acceleration detection element;
an acceleration detection signal wiring through which a detection signal of the acceleration detection element propagates; and
a shield unit that is located between the angular velocity detection element and the acceleration detection signal wiring and is connected to a fixed potential.
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Abstract
A physical quantity sensor includes: an angular velocity detection element; an acceleration detection element; a bonding wire through which a detection signal of the acceleration detection element propagates; and a shield unit that is located between the angular velocity detection element and the bonding wire and is connected to a fixed potential. The angular velocity detection element and the acceleration detection element are disposed to be deviated in a height direction. At least a part of the shield unit is disposed between the angular velocity detection element and the acceleration detection element.
8 Citations
20 Claims
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1. A physical quantity sensor comprising:
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an angular velocity detection element; an acceleration detection element; an acceleration detection signal wiring through which a detection signal of the acceleration detection element propagates; and a shield unit that is located between the angular velocity detection element and the acceleration detection signal wiring and is connected to a fixed potential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification