Wafer Level Packaging of Electronic Devices
First Claim
1. A wafer level packaging of semiconductor devices comprising of:
- a semiconductor device with a top face and bottom face and at least one metal pad located on bottom face and;
a top cover layer affixed to top face of semiconductor device and;
a bottom cover wafer affixed to bottom face of semiconductor device;
whereinthe bottom cover wafer has at least one via extending from external face of bottom wafer to internal face of said bottom wafer; and
an electroplated metal layer extends from the external face of bottom wafer through the via to the metal pad.
3 Assignments
0 Petitions
Accused Products
Abstract
Aspects of the invention are directed to an electronic device package including an electronic device comprising a first contact point; a metal pad disposed to provide electrical connection to the first contact point; a substrate comprising a first face and a second face opposing the first face of the substrate, the first face of the substrate adjacent a face of the electronic device; and a VIA passing through the substrate from the second face of the substrate to the metal pad, the VIA exhibiting: a pass through extending through the substrate from the first face to the second face; a metal layer disposed within the pass through arranged to provide electrical connectivity to the metal pad from an area adjacent the second face of the substrate; and an electrically insulating first passivation layer disposed between the metal layer and the substrate arranged to provide electrical insulation between the substrate and the metal layer.
14 Citations
10 Claims
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1. A wafer level packaging of semiconductor devices comprising of:
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a semiconductor device with a top face and bottom face and at least one metal pad located on bottom face and; a top cover layer affixed to top face of semiconductor device and; a bottom cover wafer affixed to bottom face of semiconductor device;
whereinthe bottom cover wafer has at least one via extending from external face of bottom wafer to internal face of said bottom wafer; and an electroplated metal layer extends from the external face of bottom wafer through the via to the metal pad. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of wafer level packaging of semiconductor devices comprising:
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attaching multiple semiconductor devices with metal pads to bottom wafer; applying an encapsulation layer on top of the devices and bottom wafer; making via holes in bottom cover wafer from the external surface of the wafer to the metal pads; and electroplating a metal layer to connect the semiconductor device metal pad, through the via to the external face of the wafer.
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Specification