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THIN-FILM TRANSISTOR SUBSTRATE, DISPLAY APPARATUS INCLUDING THE SAME, METHOD OF MANUFACTURING A THIN-FILM TRANSISTOR SUBSTRATE, AND METHOD OF MANUFACTURING A DISPLAY APPARATUS

  • US 20160307979A1
  • Filed: 11/04/2015
  • Published: 10/20/2016
  • Est. Priority Date: 04/14/2015
  • Status: Abandoned Application
First Claim
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1. A thin-film transistor (TFT) substrate comprising:

  • a substrate;

    a first TFT disposed on the substrate, wherein the first TFT comprises a first active pattern having a first hydrogen density and a first gate electrode overlapping a portion of the first active pattern; and

    a second TFT disposed on the substrate, wherein the second TFT comprises a second active pattern having a second hydrogen density higher than the first hydrogen density and a second gate electrode overlapping a portion of the second active pattern.

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