Rate Enhanced Pulsed DC Sputtering System

• US 20160314946A1
• Filed: 04/27/2015
• Published: 10/27/2016
• Est. Priority Date: 04/27/2015
• Status: Active Grant

• Current Assignee: AES Global Holdings Pte Ltd. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Pelleymounter, Douglas
• Granted Patent: US 9,812,305 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C23C 14/3485 using pulsed power to the target
• CPC Class Codes: C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering C23C14/3457 takes precedence
• CPC Class Codes: C23C 14/352 using more than one target C23C14/56 takes precedence
• CPC Class Codes: H01J 2237/2485 Electric or electronic means
• CPC Class Codes: H01J 2237/327 Arrangements for generating the plasma
• CPC Class Codes: H01J 2237/332 Coating
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3438 Electrodes other than cathode
• CPC Class Codes: H01J 37/3444 Associated circuits
• CPC Class Codes: H01J 37/3467 Pulsed operation, e.g. HIPIMS
• CPC Class Codes: H01J 37/3476 Testing and control

Abstract

A pulsed direct current sputtering system and method are disclosed. The system has a plasma chamber with two targets, two magnetrons and one anode, a first power source, and a second power source. The first power source is coupled to the first magnetron and the anode, and provides a cyclic first-power-source voltage with a positive potential and a negative potential during each cycle between the anode and the first magnetron. The second power source is coupled to the second magnetron and the anode, and provides a cyclic second-power-source voltage. The controller phase-synchronizes and controls the first-power-source voltage and second-power-source voltage to apply a combined anode voltage, and phase-synchronizes a first magnetron voltage with a second magnetron voltage, wherein the combined anode voltage applied to the anode has a magnitude of at least 80 percent of a magnitude of a sum of the first magnetron voltage and the second magnetron voltage.

Claims

1. A pulsed direct current sputtering system, comprising:

a plasma chamber enclosing a first magnetron coupled to a first target, a second magnetron coupled to a second target, and an anode;

a first power source coupled to the first magnetron and the anode, the first power source configured to provide a cyclic first-power-source voltage with a positive potential and a negative potential during each cycle between the anode and the first magnetron;

a second power source coupled to the second magnetron and the anode, the second power source configured to provide a cyclic second-power-source voltage with a positive potential and a negative potential during each cycle between the anode and the second magnetron; and

a controller configured to phase-synchronize and control a duty of the first-power-source voltage and second-power-source voltage to apply a bipolar anode voltage to the anode that is a combination of the cyclic first-power-source voltage and the cyclic second-power source voltage, and to phase-synchronize a first magnetron voltage with a second magnetron voltage, wherein the combined anode voltage applied to the anode has a magnitude of at least 80 percent of a magnitude of a sum of the first magnetron voltage and second magnetron voltage.

2. The system of claim 1, wherein:

the controller comprises a processor, and a non-transitory memory comprising non-transitory instructions executable by the processor to;

cause the first power source to apply a first sputtering power having a first voltage and a first current to the first magnetron for a first period of time;

cause the second power source to apply a second sputtering power having a second voltage and a second current to the second magnetron for the first period of time;

cause the first power source to apply a first anode power to the anode for a second period of time following the first period of time; and

cause the second power source to apply a second anode power to the anode for the second period of time; and

wherein

the first anode power and the second anode power result in a combined anode power having a combined current that is less than each of the first current and the second current.

3. The system of claim 1, wherein:

the controller comprises a field programmable gate array, and a non-transitory memory including non-transitory instructions accessible by the field programmable gate array to configure the field programmable gate array to;

cause the first power source to apply a first sputtering power having a first voltage and a first current to the first magnetron for a first period of time;

cause the second power source to apply a second sputtering power having a second voltage and a second current to the second magnetron for the first period of time;

cause the first power source to apply a first anode power to the anode for a second period of time following the first period of time; and

cause the second power source to apply a second anode power to the anode for the second period of time; and

wherein

the first anode power and the second anode power result in a combined anode power having a combined current that is less than each of the first current and the second current.

4. The system of claim 1, wherein:

the first power source comprises a first direct current power supply coupled to a first bi-polar controllable pulsed direct current power supply, the first bi-polar controllable pulsed direct current power supply configured to provide an alternating direct current power to the first magnetron and the anode; and

the second power source comprises a second direct current power supply coupled to a second bi-polar controllable pulsed direct current power supply, the second bi-polar controllable pulsed direct current power supply configured to provide an alternating direct current power to the second magnetron and the anode.

5. The system of claim 1 wherein:

the anode is a floating anode.

6. The system of claim 1, further comprising:

a synchronizer configured to synchronize the first power source and the second power source, wherein the non-transitory instructions include instructions to cause the synchronizer to cause the first power source and the second power source to simultaneously apply power to the first magnetron and the second magnetron for the first period of time and to cause the first power source and the second power source to simultaneously apply power to the anode for the second period of time.

7. The system of claim 1, further comprising:

a first electrical lead for coupling the first power source and the first magnetron;

a second electrical lead for coupling the second power source and the second magnetron; and

a third electrical lead for coupling the first power source, the second power source, and the anode such that an application of power by the first power source and the second power source results in the combined anode power application to the anode.

8. The system of claim 1, further comprising:

the first sputtering power to the first magnetron has a voltage having a polarity; and

the second sputtering power to the second magnetron has a voltage having the polarity;

wherein

the controller is configured to cause the polarity to reverse to effectuate an application of the first anode power for the second period of time.

14. The non-transitory memory of claim 8, wherein:

the anode is a floating anode.

9. A non-transitory memory including non-transitory instructions that are at least one of executable by a processor to execute a method and accessible by a field programmable gate array to configure the field programmable gate array to execute the method, the method comprising:

causing a first power source to apply a first sputtering power having a first voltage and a first current to a first magnetron in a plasma chamber for a first period of time;

causing a second power source to apply a second sputtering power having a second voltage and a second current to a second magnetron in the plasma chamber for the first period of time, the first voltage and the second voltage providing a summed sputtering voltage;

causing the first power source to apply a first anode power to an anode in the plasma chamber for a second period of time following the first period of time;

causing the second power source to apply a second anode power to the anode for the second period of time, the first anode power and the second anode power providing a combined anode power having a combined voltage and a combined current;

wherein

the combined voltage has a magnitude of at least 80 percent of a magnitude of the summed sputtering voltage; and

the first period of time is at least 70 percent of a sputtering cycle, the sputtering cycle comprised of the first period of time and the second period of time.

10. The non-transitory memory of claim 9, wherein:

the first period of time is at least 85 percent of the sputtering cycle.

11. The non-transitory memory of claim 9, wherein:

the combined current is less than each of the first current and the second current.

12. The non-transitory memory of claim 11, wherein:

the first voltage has a magnitude of at least 300 Volts; and

the second voltage has a magnitude of at least 300 Volts.

13. The non-transitory memory of claim 11, wherein:

the combined voltage has a magnitude of at least 1000 Volts.

15. A method of pulsed direct current sputtering, comprising:

providing a plasma chamber enclosing a first magnetron coupled to a first target, a second magnetron coupled to a second target, and an anode;

a first power source coupled to the first magnetron and the anode;

a second power source coupled to the second magnetron and the anode; and

a controller configured to control the first power source and the second power source, the controller comprising a non-transitory memory including non-transitory instructions that are at least one of executable by a processor to execute a method and accessible by a field programmable gate array to configure the field programmable gate array to execute the method;

the method comprising;

causing the first power source to apply a first sputtering power having a first voltage and a first current to the first magnetron for a first period of time;

causing the second power source to apply a second sputtering power having a second voltage and a second current to the second magnetron for the first period of time, the first voltage and the second voltage providing a summed sputtering voltage;

causing the first power source to apply a first anode power to the anode for a second period of time following the first period of time;

causing the second power source to apply a second anode power to the anode for the second period of time, the first anode power and the second anode power providing a combined anode power having a combined voltage and a combined current;

wherein

the combined voltage has a magnitude of at least 80 percent of a magnitude of the summed sputtering voltage; and

the first period of time is at least 70 percent of a sputtering cycle, the sputtering cycle comprised of the first period of time and the second period of time.

16. The method of claim 15, wherein:

the first period of time is at least 85 percent of the sputtering cycle.

17. The method of claim 15, wherein:

the combined current is less than each of the first current and the second current.

18. The method of claim 17, wherein:

the first voltage has a magnitude of at least 300 Volts; and

the second voltage has a magnitude of at least 300 Volts.

19. The method of claim 15, wherein:

the anode is a floating anode.

20. The method of claim 15, comprising:

causing the first power source and the second power source to simultaneously apply the first sputtering power to the first magnetron and the second sputtering power to the second magnetron for the first period of time, the first sputtering power having a voltage having a polarity, and the second sputtering power having a voltage having the polarity, and to cause the first power source and the second power source to simultaneously reverse the polarity to apply the anode power to the anode for the second period of time.