SYSTEM AND METHOD OF CONTROLLING A ROBOT
First Claim
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1. A system for controlling a robot moving vertically and horizontally using a motor, the system comprising:
- a detector suitable for generating a feedback signal by detecting physical status of the motor; and
a controller suitable for detecting loading of a substrate on the robot based on the feedback signal during a vertical moving interval of the robot, and generating a control command in accordance with the detection of the loading of the substrate.
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Abstract
A system for controlling a robot moving vertically and horizontally using a motor is provided. The system includes a detector suitable for generating a feedback signal by detecting physical status of the motor; and a controller suitable for detecting loading of a substrate on the robot based on the feedback signal during a vertical moving interval of the robot, and generating a control command in accordance with the detection of the loading of the substrate.
14 Citations
24 Claims
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1. A system for controlling a robot moving vertically and horizontally using a motor, the system comprising:
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a detector suitable for generating a feedback signal by detecting physical status of the motor; and a controller suitable for detecting loading of a substrate on the robot based on the feedback signal during a vertical moving interval of the robot, and generating a control command in accordance with the detection of the loading of the substrate. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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2. The system of claim wherein the controller comprises:
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a substrate-detecting unit suitable for generating a substrate detection signal based on speed and position error of the motor, wherein the speed of the motor is detected from the feedback signal; and a robot-controlling unit suitable for generating the control command based on the substrate detection signal and a difference between the feedback signal and a command signal. - View Dependent Claims (3, 4)
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16. A method of controlling a robot moving vertically and horizontally using a motor, the method comprising:
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receiving a feedback signal representing physical status of the motor; generating a substrate detection signal by detecting loading of a substrate on the robot based on the feedback signal during a vertical moving interval of the robot; and generating a control command based on the substrate detection signal. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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Specification