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MEMS DEVICE AND METHOD OF MANUFACTURING A MEMS DEVICE

  • US 20160318759A1
  • Filed: 07/11/2016
  • Published: 11/03/2016
  • Est. Priority Date: 10/12/2012
  • Status: Active Grant
First Claim
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1. A method for manufacturing microelectromechanical systems (MEMS) devices, the method comprising:

  • forming a MEMS stack on a first main surface of a substrate;

    forming a polymer layer on a second main surface of the substrate; and

    forming a first opening in the polymer layer and the substrate such that the first opening abuts the MEMS stack.

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