TOUCH SENSOR DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
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1. A touch sensor device, comprising:
- a first conductive pattern disposed on a substrate;
a first polymer layer disposed on the first conductive pattern, the first polymer layer comprising a first conductive region and a first non-conductive region; and
a second polymer layer disposed on the first polymer layer, the second polymer layer comprising a second conductive region and a second non-conductive region.
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Abstract
A touch sensor device including a first conductive pattern disposed on a substrate and a first polymer layer disposed on the first conductive pattern. The first polymer layer includes a first conductive region and a first non-conductive region. The touch sensor device also includes a second polymer layer disposed on the first polymer layer. The second polymer layer includes a second conductive region and a second non-conductive region.
40 Citations
20 Claims
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1. A touch sensor device, comprising:
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a first conductive pattern disposed on a substrate; a first polymer layer disposed on the first conductive pattern, the first polymer layer comprising a first conductive region and a first non-conductive region; and a second polymer layer disposed on the first polymer layer, the second polymer layer comprising a second conductive region and a second non-conductive region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A manufacturing method of a touch sensor device, comprising:
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stacking and patterning a conductive layer on a substrate to form a first conductive pattern; applying a first polymer material on an entire surface of the first conductive pattern to form a first polymer layer; disposing a first mask pattern on a portion of the first polymer layer; oxidizing the portion of the first polymer layer not covered by the first mask pattern to form a first non-conductive region in the portion of the first polymer layer not covered by the first mask pattern and a first conductive region in the portion covered by the first mask pattern; applying a second polymer material on an entire surface of the first polymer layer to form a second polymer layer; and disposing a second mask pattern on a portion of the second polymer layer; oxidizing the portion of the second polymer layer not covered by the second mask pattern to form a second non-conductive region in the portion of the second polymer layer not covered by the second mask pattern and a second conductive region covered by the second mask pattern. - View Dependent Claims (17, 18, 19, 20)
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Specification