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Metrology Method and Apparatus, Computer Program and Lithographic System

  • US 20160325504A1
  • Filed: 04/26/2016
  • Published: 11/10/2016
  • Est. Priority Date: 05/07/2015
  • Status: Active Grant
First Claim
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1. A method of metrology comprising:

  • acquiring inspection data, said inspection data comprising a plurality of inspection data elements, each inspection data element having been obtained by inspection of a corresponding target structure formed using a lithographic process; and

    performing an unsupervised cluster analysis on said inspection data, thereby partitioning said inspection data into a plurality of clusters in accordance with a metric.

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