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MEMS Method and Structure

  • US 20160325988A1
  • Filed: 07/18/2016
  • Published: 11/10/2016
  • Est. Priority Date: 03/12/2013
  • Status: Active Grant
First Claim
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1. A microelectromechanical structure comprising:

  • a moveable mass separated from a support region, the moveable mass being moveable relative to a support region;

    a first support film located on the moveable mass, the first support film having a first edge aligned with an edge of the moveable mass; and

    a second support film located on the support region, the second support film having a second edge aligned with an edge of the support region, wherein the first support film and the second support film comprise a same material.

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