MEMS Method and Structure
First Claim
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1. A microelectromechanical structure comprising:
- a moveable mass separated from a support region, the moveable mass being moveable relative to a support region;
a first support film located on the moveable mass, the first support film having a first edge aligned with an edge of the moveable mass; and
a second support film located on the support region, the second support film having a second edge aligned with an edge of the support region, wherein the first support film and the second support film comprise a same material.
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Abstract
MEMS structures and methods utilizing a locker film are provided. In an embodiment a locker film is utilized to hold and support a moveable mass region during the release of the moveable mass region from a surrounding substrate. By providing additional support during the release of the moveable mass, the locker film can reduce the amount of undesired movement that can occur during the release of the moveable mass, and preventing undesired etching of the sidewalls of the moveable mass.
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Citations
20 Claims
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1. A microelectromechanical structure comprising:
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a moveable mass separated from a support region, the moveable mass being moveable relative to a support region; a first support film located on the moveable mass, the first support film having a first edge aligned with an edge of the moveable mass; and a second support film located on the support region, the second support film having a second edge aligned with an edge of the support region, wherein the first support film and the second support film comprise a same material. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A microelectromechanical structure comprising:
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a moveable mass region; a support region; and a locking material comprising; a first portion in physical contact with a first surface of the moveable mass region, wherein a portion of the first surface of the moveable mass region is uncovered by the locking material; a second portion in physical contact with a first surface of the support region, wherein a portion of the first surface of the support region is uncovered by the locking material; and an opening between the first portion and the second portion, the opening allowing the moveable mass region to move relative to the support region. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. A microelectromechanical device comprising:
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a locking material; a first opening through the locking material, wherein the first opening has a first sidewall and a second sidewall opposite the first sidewall; a moveable mass with a third sidewall aligned with the second sidewall; a support mass with a fourth sidewall aligned with the first sidewall; and a substrate on an opposite side of the locking material from the moveable mass, the substrate being electrically connected to the support mass. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification