ATMOSPHERIC-PRESSURE PLASMA TREATMENT SYSTEM
First Claim
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1. An atmospheric-pressure plasma treatment system, comprising:
- a plasma source including an AC power supply, at least one electrode, and a gas in a gas chamber;
a radial-flow surface having a jet nozzle through which the gas flows; and
a pre-cursor distributor for feeding one or more precursor chemicals into the gas flow.
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Abstract
An atmospheric-pressure plasma treatment system includes a plasma source including an AC power supply, at least one electrode, and a gas in a gas chamber. A radial-flow surface has a jet nozzle through which the gas flows. A pre-cursor distributor feeds one or more precursor chemicals into the gas flow.
12 Citations
20 Claims
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1. An atmospheric-pressure plasma treatment system, comprising:
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a plasma source including an AC power supply, at least one electrode, and a gas in a gas chamber; a radial-flow surface having a jet nozzle through which the gas flows; and a pre-cursor distributor for feeding one or more precursor chemicals into the gas flow. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification