ACTIVE, IN-SITU, CALIBRATION OF MEMS ACCELEROMETERS USING OPTICAL FORCES
First Claim
1. A method of calibrating an accelerometer, the method comprising:
- directing an output of a laser source onto a proof mass of an accelerometer to create a scattering force of a first magnitude applied to the proof mass;
while applying the scattering force to the proof mass at the first magnitude, obtaining a first output from the accelerometer;
directing the output of the laser source onto the proof mass of the accelerometer to create a scattering force of a second magnitude applied to the proof mass;
while applying the scattering force to the proof mass at the second magnitude, obtaining a second output from the accelerometer;
based on the first output and the second output, determining a scale factor for the accelerometer;
obtaining a third output for the accelerometer; and
based on the scale factor and the third output, determining an acceleration value.
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Accused Products
Abstract
An accelerometer device configured for in-situ calibration applies a laser-induced pushing force at a first magnitude to a proof mass of an accelerometer, and while applying the laser-induced pushing force at the first magnitude to the proof mass, the device obtains a first output from the accelerometer. The device is further configured to apply a laser-induced pushing force at a second magnitude to the proof mass, and while applying the laser-induced pushing force at the second magnitude to the proof mass, the device obtains a second output from the accelerometer. Based on the first output and the second output, the device determines a scale factor for the accelerometer. The device is configured to determine a third output for the accelerometer, and based on the scale factor and the third output, determine an acceleration value.
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Citations
20 Claims
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1. A method of calibrating an accelerometer, the method comprising:
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directing an output of a laser source onto a proof mass of an accelerometer to create a scattering force of a first magnitude applied to the proof mass; while applying the scattering force to the proof mass at the first magnitude, obtaining a first output from the accelerometer; directing the output of the laser source onto the proof mass of the accelerometer to create a scattering force of a second magnitude applied to the proof mass; while applying the scattering force to the proof mass at the second magnitude, obtaining a second output from the accelerometer; based on the first output and the second output, determining a scale factor for the accelerometer; obtaining a third output for the accelerometer; and based on the scale factor and the third output, determining an acceleration value. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An accelerometer device comprising:
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a proof mass; one or more anchor elements connected to the proof mass; a laser source configured to direct laser light onto the proof mass; a laser control module configured to; cause the laser source to apply a scattering force of a first magnitude to the proof mass; cause the laser source to apply a scattering force of a second magnitude to the proof mass; a sense module configured to; while the laser source applies the scattering force of the first magnitude to the proof mass, obtain a first output from the accelerometer, while the laser source applies the scattering force of the second magnitude to the proof mass, obtain a second output from the accelerometer; and determine a third output for the accelerometer; and a controller configured to; based on the first output and the second output, determine a scale factor for the accelerometer, and based on the scale factor and the third output, determine an acceleration value. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification