×

SYSTEM FOR DISCHARGING AN AREA THAT IS SCANNED BY AN ELECTRON BEAM

  • US 20160336146A1
  • Filed: 05/12/2015
  • Published: 11/17/2016
  • Est. Priority Date: 05/12/2015
  • Status: Active Grant
First Claim
Patent Images

1. A system for imaging an object, the system comprises:

  • electron optics that is configured to scan a first area of the object with at least one electron beam;

    wherein the electron optics comprises a first electrode; and

    light optics that is configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×