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THIN FILM TRANSISTOR, FABRICATING METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY DEVICE

  • US 20160336349A1
  • Filed: 09/17/2014
  • Published: 11/17/2016
  • Est. Priority Date: 04/22/2014
  • Status: Active Grant
First Claim
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1. A fabricating method of a thin film transistor, comprising steps of:

  • forming an inducing layer film and an oxide active layer film in contact therewith on a substrate, the oxide active layer film being provided above or below the inducing layer film; and

    heating the substrate subjected to the above step, crystallizing the oxide active layer film through inducement of the inducing layer film to form a crystalline oxide active layer.

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