METHODS OF FORMING PATTERNS, METHODS OF MANUFACTURING A MAGNETIC MEMORY DEVICE USING THE METHODS OF FORMING PATTERNS, AND MAGNETIC MEMORY DEVICES MANUFACTURED USING THE SAME

• US 20160336509A1
• Filed: 04/08/2016
• Published: 11/17/2016
• Est. Priority Date: 05/15/2015
• Status: Abandoned Application

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Yoon-Jong Song
• Inventors: SONG, Yoonjong, SHIN, Hyunchul, JEONG, Daeeun
• Application Number:
  US15/093,994
• Publication Number:
  US 20160336509A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01L 21/02071 the processing being a delineation, e.g. RIE, of conductive layers
• CPC Class Codes: H01L 21/02266 deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition
• CPC Class Codes: H01L 21/31105 Etching inorganic layers
• CPC Class Codes: H01L 21/32131 by physical means only
• CPC Class Codes: H10N 50/01 Manufacture or treatment

Abstract

A method of forming patterns includes forming an etch target layer on a substrate, patterning the etch target layer to form patterns, forming an insulating layer on sidewalls of the patterns using a first ion beam generated from a first ion source, and removing the insulating layer using a second ion beam generated from a second ion source, wherein each of the first and second ion sources includes an insulating source, and wherein the insulating source includes at least one of oxygen or nitrogen.

Claims

1. A method of forming patterns, the method comprising:

forming an etch target layer on a substrate;

patterning the etch target layer to form patterns;

forming an insulating layer on sidewalls of the patterns using a first ion beam generated from a first ion source; and

removing the insulating layer using a second ion beam generated from a second ion source,

wherein each of the first and second ion sources includes an insulating source, and

wherein the insulating source includes at least one of oxygen or nitrogen.

2. The method as claimed in claim 1, wherein a concentration of the insulating source in the first ion source is different from a concentration of the insulating source in the second ion source.

3. The method as claimed in claim 2, wherein the concentration of the insulating source in the first ion source is higher than the concentration of the insulating source in the second ion source.

7. The method as claimed in claim 1, wherein:

forming the insulating layer includes irradiating the first ion beam at a first angle with respect to a top surface of the substrate, and

removing the insulating layer includes irradiating the second ion beam at a second angle with respect to the top surface of the substrate, the first angle being different from the second angle.

8. The method as claimed in claim 7, wherein the first angle is greater than the second angle.

11. The method as claimed in claim 1, wherein forming the insulating layer includes forming a first insulating layer and a second insulating layer which are sequentially stacked on the sidewalls of the patterns,

wherein the first insulating layer is disposed between the second insulating layer and the sidewalls of the patterns,

wherein the insulating source of the first ion source is oxygen when the first insulating layer is formed, and

wherein the insulating source of the first ion source is oxygen and nitrogen when the second insulating layer is formed.

12. The method as claimed in claim 11, wherein a nitrogen concentration of the second insulating layer is higher than a nitrogen concentration of the first insulating layer.

13. The method as claimed in claim 1, wherein forming the insulating layer includes:

irradiating the first ion beam at a first angle with respect to a top surface of the substrate to form a first insulating layer;

irradiating the first ion beam at a second angle with respect to the top surface of the substrate to form a second insulating layer; and

irradiating the first ion beam at a third angle with respect to the top surface of the substrate to form a third insulating layer, the second angle being smaller than the first angle and the third angle.

15. The method as claimed in claim 13, wherein the first ion beam has a first incident energy when the first insulating layer is formed, and the first ion beam has a second incident energy greater than the first incident energy when the third insulating layer is formed.

16. The method as claimed in claim 13, wherein removing the insulating layer includes irradiating the second ion beam at a fourth angle with respect to the top surface of the substrate, the fourth angle being smaller than the first angle and the third angle.

18. The method as claimed in claim 1, wherein forming the insulating layer includes forming a first insulating layer and a second insulating layer which are sequentially stacked on the sidewalls of the patterns,

wherein the first insulating layer is disposed between the second insulating layer and the sidewalls of the patterns,

wherein the first ion beam has a first incident energy when the first insulating layer is formed, and

wherein the first ion beam has a second incident energy greater than the first incident energy when the second insulating layer is formed.

20. The method as claimed in claim 18, wherein:

the first ion beam is irradiated at a first angle with respect to a top surface of the substrate when the first insulating layer is formed,

the first ion beam is irradiated at a second angle with respect to the top surface of the substrate when the second insulating layer is formed, and

removing the insulating layer includes irradiating the second ion beam at a third angle with respect to the top surface of the substrate, the third angle being smaller than the first angle and the second angle.

4-6. -6. (canceled)

9-10. -10. (canceled)

14. (canceled)

17. (canceled)

19. (canceled)

21. (canceled)

22. A method of manufacturing a magnetic memory device, the method comprising:

forming a magnetic tunnel junction layer on a substrate;

patterning the magnetic tunnel junction layer to form magnetic tunnel junction patterns;

forming an insulating layer on sidewalls of the magnetic tunnel junction patterns using a first ion beam generated from a first ion source; and

removing the insulating layer using a second ion beam generated from a second ion source,

wherein each of the first and second ion sources includes an insulating source, and

wherein the insulating source includes at least one of oxygen or nitrogen.

23. The method as claimed in claim 22, wherein a concentration of the insulating source in the first ion source is higher than a concentration of the insulating source in the second ion source.

25. The method as claimed in claim 22, wherein:

forming the insulating layer includes irradiating the first ion beam at a first angle with respect to a top surface of the substrate, and

removing the insulating layer includes irradiating the second ion beam at a second angle with respect to the top surface of the substrate, the first angle being greater than the second angle.

26. The method as claimed in claim 22, further comprising forming top electrodes on the magnetic tunnel junction patterns before forming the insulating layer,

wherein each of the top electrodes is spaced apart from the substrate with each of the magnetic tunnel junction patterns interposed therebetween, and

wherein at least a portion of each of the top electrodes is oxidized or nitrified during the formation of the insulating layer.

24. (canceled)

27-28. -28. (canceled)

29. A method of forming patterns, the method comprising:

forming an etch target layer on a substrate;

patterning the etch target layer to form patterns;

irradiating a first ion beam from a first ion source toward the patterns, such that a first insulating source in the first ion source interacts with residue on the patterns to form an insulating layer on sidewalls of the patterns; and

removing the insulating layer from the sidewalls of the patterns,

wherein the first insulating source includes at least one of oxygen or nitrogen.

30. The method as claimed in claim 29, wherein removing the insulating layer from the sidewalls of the patterns is performed using a second ion beam generated from a second ion source, the second ion source including a second insulating source, and the second insulating source including at least one of oxygen or nitrogen.

32. The method as claimed in claim 29, wherein irradiating the first ion beam from the first ion source includes interacting the first insulating source in the first ion beam with metal elements in the residue on sidewalls of the patterns to form the insulating layer, the residue including metal elements of the tech target layer redeposited on the sidewalls of the patterns after patterning the etch target layer.

33. The method as claimed in claim 32, wherein removing the insulating layer from the sidewalls of the patterns includes removing the residue from the sidewalls of the patterns.

31. (canceled)

34-35. -35. (canceled)