MICROPHONE WITH COINED AREA
First Claim
Patent Images
1. A microphone comprising:
- a base;
a microelectromechanical system (MEMS) die mounted to the base, an integrated circuit fixed to the base;
a lid mounted to the base that encloses the MEMS die and the integrated circuit within a cavity formed by the base and the lid, wherein the lid has an indented portion extending into but not fully through the lid.
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Abstract
A microphone includes a base and a microelectromechanical system (MEMS) die mounted to the base. The microphone also includes an integrated circuit fixed to the base. The microphone further includes a lid mounted to the base that encloses the MEMS die and the integrated circuit within a cavity formed by the base and the lid. The lid has an indented portion extending into but not fully through the lid.
32 Citations
21 Claims
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1. A microphone comprising:
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a base; a microelectromechanical system (MEMS) die mounted to the base, an integrated circuit fixed to the base; a lid mounted to the base that encloses the MEMS die and the integrated circuit within a cavity formed by the base and the lid, wherein the lid has an indented portion extending into but not fully through the lid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification