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METHOD FOR CONTROLLING SHAPE MEASURING APPARATUS

  • US 20160341533A1
  • Filed: 04/28/2016
  • Published: 11/24/2016
  • Est. Priority Date: 05/22/2015
  • Status: Active Grant
First Claim
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1. A method for controlling a shape measuring apparatus including a probe having a stylus tip at a tip, and a moving mechanism which moves the stylus tip scanning a surface of a workpiece, and configured to measure a shape of the workpiece by detecting contact between the stylus tip and the surface of the workpiece, the method comprising:

  • calculating a scanning path to move the stylus tip based on design data of the workpiece;

    moving the stylus tip along the scanning path;

    monitoring whether a distance between the scanning path and an actual workpiece is excessive;

    generating a trajectory difference error when the distance between the scanning path and the actual workpiece is excessive;

    performing, when the trajectory difference error is generated, geometric correction to the design data such that the design data approaches to the actual workpiece; and

    performing scanning measurement based on the design data after the geometric correction.

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