ROTATION RATE SENSOR AND METHOD FOR OPERATING A ROTATION RATE SENSOR WITH CIRCULAR DRIVE
First Claim
1. A rotation rate sensor, comprising:
- a substrate having a principal extension plane;
a first Coriolis element which is movable with respect to the substrate;
a first suspension element which movably suspends the first Coriolis element relative to the substrate; and
a first excitation element to drive the first Coriolis element in such a way that with the first excitation element activated, wherein the first Coriolis element continuously exhibits motion states deflected with respect to a rest position, and wherein a velocity vector of a mass center point of the first Coriolis element has, in each of the deflected motion states, has an absolute value from greater than or equal to 90% of a predefined target velocity to less than or equal to 110% of the predefined target velocity.
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Abstract
A rotation rate sensor, comprising a substrate having a principal extension plane and comprising a first Coriolis element movable with respect to the substrate and comprising a first suspension means movably suspending the first Coriolis element relative to the substrate, is proposed; the rotation rate sensor having a first excitation means for driving the first Coriolis element in such a way that with the first excitation means activated, the first Coriolis element continuously exhibits motion states deflected with respect to a rest position, the velocity vector of the mass center point of the first Coriolis element having, in each of the deflected motion states, an absolute value from greater than or equal to 90% of a predefined target velocity to less than or equal to 110% of the predefined target velocity.
7 Citations
10 Claims
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1. A rotation rate sensor, comprising:
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a substrate having a principal extension plane; a first Coriolis element which is movable with respect to the substrate; a first suspension element which movably suspends the first Coriolis element relative to the substrate; and a first excitation element to drive the first Coriolis element in such a way that with the first excitation element activated, wherein the first Coriolis element continuously exhibits motion states deflected with respect to a rest position, and wherein a velocity vector of a mass center point of the first Coriolis element has, in each of the deflected motion states, has an absolute value from greater than or equal to 90% of a predefined target velocity to less than or equal to 110% of the predefined target velocity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for operating a rotation rate sensor, the rotation rate sensor including a substrate having a principal extension plane, a first Coriolis element movable with respect to the substrate, a first suspension element movably suspending the first Coriolis element relative to the substrate, and a first excitation element, the method comprising:
exciting the first Coriolis element with the aid of the first excitation element into an excitation oscillation substantially along a substantially closed circular trajectory located substantially parallel to the principal extension plane and substantially clockwise around a first axis when looking onto the principal extension plane, to cause the first Coriolis element to continuously exhibit motion states deflected with respect to a rest position, the velocity vector of the mass center point of the first Coriolis element having, in each of the deflected motion states, an absolute value from greater than or equal to 90% of a predefined target velocity to less than or equal to 110% of the predefined target velocity. - View Dependent Claims (10)
Specification