ELECTRO-MECHANICAL MINIATURIZED DEVICE FOR PRESSURE MEASUREMENTS
First Claim
1. An electro-mechanical miniaturized device for pressure measurements, comprising:
- at least one first electro-mechanical miniaturized pressure sensor member configured to detect a respective first pressure value (P1) and to generate a first electrical signal (S1) representative of said first pressure value (P1);
at least one second electro-mechanical miniaturized pressure sensor member, arranged within a respective casing that is suitable to seal the second sensor member, and configured to detect a respective second pressure value (P2) and to generate a second electrical signal (S2) representative of said second pressure value (P2);
electronic processing means, operatively connected to the first and the second sensor members, configured to determine a measured pressure value (P) based on said first (S1) and second (S2) electrical signals;
interface means, operatively connected to the electronic processing means and configured to provide in output said measured pressure value (P),wherein said first and second sensor members, electronic processing means, and interface means are comprised in a single integrated device.
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Accused Products
Abstract
An electro-mechanical miniaturized device 1 for pressure measurements is described, the device comprising at least one first electro-mechanical miniaturized pressure sensor member 11, configured to detect a respective first pressure value P1 and to generate a first electrical signal S1 representative of the first pressure value P1, and further comprising at least one second electro-mechanical miniaturized pressure sensor member 12, configured to detect a respective second pressure value P2 and to generate a second electrical signal S2 representative of said second pressure value P2. The second sensor member 12 is arranged within a casing 13 suitable to seal it. The device 1 further comprises electronic processing means 10, operatively connected to the first 11 and the second 12 sensor members, and configured to determine a measured pressure value P based on said first S1 and second S2 electrical signals; and finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to provide in output said measured pressure value P. The first 11 and second 12 sensor members, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.
28 Citations
15 Claims
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1. An electro-mechanical miniaturized device for pressure measurements, comprising:
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at least one first electro-mechanical miniaturized pressure sensor member configured to detect a respective first pressure value (P1) and to generate a first electrical signal (S1) representative of said first pressure value (P1); at least one second electro-mechanical miniaturized pressure sensor member, arranged within a respective casing that is suitable to seal the second sensor member, and configured to detect a respective second pressure value (P2) and to generate a second electrical signal (S2) representative of said second pressure value (P2); electronic processing means, operatively connected to the first and the second sensor members, configured to determine a measured pressure value (P) based on said first (S1) and second (S2) electrical signals; interface means, operatively connected to the electronic processing means and configured to provide in output said measured pressure value (P), wherein said first and second sensor members, electronic processing means, and interface means are comprised in a single integrated device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for measuring pressure, carried out by an electro-mechanical miniaturized device, the method comprising the steps of:
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detecting a first pressure value (P1) and generating a first electrical signal (S1) representative of the first pressure value (P1), by at least one first electro-mechanical miniaturized pressure sensor member of the device; detecting a second pressure value (P2) and generating a second electrical signal (S2) representative of the second pressure value (P2), by at least one second electro-mechanical miniaturized pressure sensor member of the device, arranged within a respective casing that is suitable to seal it; determining a measured pressure value (P) based on said first (S1) and second (S2) electrical signals, by electronic processing means of the device; providing in output the measured pressure value (P), by interface means of the device, wherein said first and second sensor members, electronic processing means, and interface means are comprised in a single integrated device. - View Dependent Claims (15)
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Specification