CAPACITIVE PHYSICAL QUALITY DETECTION DEVICE
First Claim
1. A capacitive physical quality detection device comprising:
- a sensor part including;
a movable electrode configured to be displaced by changing of physical quantity;
a first fixed electrode disposed to face a first portion of the movable electrode; and
a second fixed electrode disposed to face a second portion of the movable electrode;
a control circuit configured to apply a signal between the movable electrode and the first fixed electrode, and between the movable electrode and the second fixed electrode; and
a CV conversion circuit configured to receive a reference voltage and to output a voltage corresponding to a capacitance change between the movable electrode and the first fixed electrode, and between the movable electrode and the second fixed electrode,whereinin a first time period, the control circuit applies a first signal to the first fixed electrode and applies a second signal to the second fixed electrode, the second signal being opposite in phase to the first signal, andin a second time period, the control circuit applies the reference voltage to the first fixed electrode and applies the second signal to the second fixed electrode.
1 Assignment
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Accused Products
Abstract
A capacitive physical quality detection device includes a sensor part, a control circuit, and a CV conversion circuit. The sensor part includes a movable electrode, a first fixed electrode, and a second fixed electrode. The CV conversion circuit is configured to receive a reference voltage and to output a voltage corresponding to a capacitance change. In a first time period, the control circuit applies a first signal to the first fixed electrode, and applies a second signal, which is opposite in phase to the first signal, to the second fixed electrode. In a second time period, the control circuit applies the reference voltage to the first fixed electrode and applies the second signal to the second fixed electrode.
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Citations
7 Claims
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1. A capacitive physical quality detection device comprising:
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a sensor part including; a movable electrode configured to be displaced by changing of physical quantity; a first fixed electrode disposed to face a first portion of the movable electrode; and a second fixed electrode disposed to face a second portion of the movable electrode; a control circuit configured to apply a signal between the movable electrode and the first fixed electrode, and between the movable electrode and the second fixed electrode; and a CV conversion circuit configured to receive a reference voltage and to output a voltage corresponding to a capacitance change between the movable electrode and the first fixed electrode, and between the movable electrode and the second fixed electrode, wherein in a first time period, the control circuit applies a first signal to the first fixed electrode and applies a second signal to the second fixed electrode, the second signal being opposite in phase to the first signal, and in a second time period, the control circuit applies the reference voltage to the first fixed electrode and applies the second signal to the second fixed electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification