PRESSURE-TYPE FLOW RATE CONTROL DEVICE

• US 20160349763A1
• Filed: 11/25/2014
• Published: 12/01/2016
• Est. Priority Date: 12/05/2013
• Status: Active Grant

• Current Assignee: Fujikin Incorporated
• Original Assignee: Fujikin Incorporated
• Inventors: Hirose, Takashi, Yoshida, Toshihide, Matsumoto, Atsushi, Hirata, Kaoru, Ikeda, Nobukazu, Nishino, Kouji, Dohi, Ryousuke, Sugita, Katsuyuki
• Granted Patent: US 10,372,145 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: F16K 31/007 Piezoelectric stacks
• CPC Class Codes: F16K 7/14 arranged to be deformed against a flat seat
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.

Claims

1. A pressure-type flow rate control device comprising:

a body provided with a fluid passage communicating a fluid inlet and a fluid outlet,

a control valve for pressure control fixed to the body to open and close the fluid passage,

an orifice arranged in the course of the fluid passage on the downstream side of the control valve for pressure control, and

a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve for pressure control and the orifice, wherein,

the fluid passage comprises a first passage portion communicating the control valve for pressure control and a pressure detection chamber on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice, whereby the fluid passage is configured to go through the pressure detection chamber.

2. The pressure-type flow rate control device according to claim 1, wherein the pressure sensor is arranged below the control valve for pressure control, and the first passage portion vertically extends from the control valve for pressure control to the pressure detection chamber.

3. The pressure-type flow rate control device according to claim 2, wherein the control valve for pressure control comprises a metallic diaphragm valve element, and the first passage portion is configured to vertically extend from a central portion of the metallic diaphragm valve element of the control valve for pressure control.

4. The pressure-type flow rate control device according to claim 2, wherein the first passage portion is connected to an end portion of the pressure detection chamber.

5. The pressure-type flow rate control device according to claim 1, wherein the second passage portion is connected to an end portion of the pressure detection chamber.

6. The pressure-type flow rate control device according to claim 4, wherein the second passage portion is connected to an end portion opposite to the first passage portion of the pressure detection chamber.

7. The pressure-type flow rate control device according to claim 1, wherein the pressure sensor is inserted into a recessed portion formed on a bottom face of the body via a ring gasket, the pressure detection chamber being surrounded by an inner bottom face of the recessed portion, the ring gasket, and a pressure detection surface of the pressure sensor, and wherein the ring gasket has sealing faces on both sides formed to lean to the side of the inner circumferential surface side.

8. The pressure-type flow rate control device according to claim 7, wherein the distance between the inner bottom face of the recessed portion of the pressure detection chamber and the pressure detection surface is 0.13 to 0.30 mm.

9. A pressure-type flow rate control device comprising:

a body provided with a fluid passage communicating a fluid inlet and a fluid outlet,

a control valve for pressure control fixed to the body to open and close the fluid passage,

an orifice arranged in the course of the fluid passage on the downstream side of the control valve for pressure control, and

a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve for pressure control and the orifice, the pressure sensor being arranged below the control valve for pressure control, wherein,

the fluid passage comprises a first passage portion which vertically extends from the control valve for pressure control to a pressure detection chamber provided on the pressure detection surface of the pressure sensor, and a third passage portion which connects the first passage portion and the orifice.

10. The pressure-type flow rate control device according to claim 9, wherein the pressure sensor is inserted into and fixed to a recessed portion formed on a bottom face of the body via a ring gasket, the pressure detection chamber is surrounded by an inner bottom face of the recessed portion, the ring gasket, and a pressure detection surface of the pressure sensor, and the ring gasket has sealing faces on both sides formed to lean to the side of an inner circumferential surface side.

11. The pressure-type flow rate control device according to claim 10, wherein the ring gasket comprises sealing faces on both sides, an inner circumferential surface, an outer circumferential surface, inner tapered faces between the inner circumferential surface and sealing faces on both sides, and outer tapered faces between the outer circumferential surface and sealing faces on both sides, and the inner tapered faces are smaller than the outer tapered faces.

12. The pressure-type flow rate control device according to claim 10, wherein the distance between the inner bottom face of the recessed portion of the pressure detection chamber and the pressure detection surface is 0.13 to 0.30 mm.

13. A pressure-type flow rate control device comprising:

a body provided with a fluid passage communicating a fluid inlet and a fluid outlet,

a control valve for pressure control fixed to the body to open and close the fluid passage,

a pressure sensor fixed to the body to detect the internal pressure of the fluid passage on the downstream side of the control valve for pressure control, and

an orifice arranged in the course of the fluid passage on the downstream side of the pressure sensor, wherein,

the pressure sensor is inserted into and fixed to a recessed portion formed on a bottom face of the body via a ring gasket, the pressure detection chamber is surrounded by an inner bottom face of the recessed portion, the ring gasket, and a pressure detection surface of the pressure sensor, and the ring gasket has sealing faces on both sides formed to lean to the side of an inner circumferential surface side.

14. The pressure-type flow rate control device according to claim 13, wherein the distance between the inner bottom face of the recessed portion of the pressure detection chamber and the pressure detection surface is 0.13 to 0.30 mm.