ELECTRONIC DEVICE, QUANTUM INTERFERENCE DEVICE, ATOMIC OSCILLATOR, MAGNETOCARDIOGRAPH, OSCILLATOR, ELECTRONIC APPARATUS, MOVING OBJECT, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
First Claim
Patent Images
1. An electronic device comprising:
- a base portion;
a functional component that is disposed on the base portion;
a lid portion that constitutes an internal space accommodating the functional component, together with the base portion; and
a getter material that has a gap with respect to the base portion in the internal space and is disposed on the base portion.
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Accused Products
Abstract
An atomic oscillator includes a base, an atomic cell unit that is disposed on the base, a lid that constitutes an internal space accommodating the atomic cell unit together with the base, and a getter material that is disposed on the base with a gap with respect to the base in the internal space.
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Citations
20 Claims
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1. An electronic device comprising:
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a base portion; a functional component that is disposed on the base portion; a lid portion that constitutes an internal space accommodating the functional component, together with the base portion; and a getter material that has a gap with respect to the base portion in the internal space and is disposed on the base portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of manufacturing an electronic device, the method comprising:
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forming an internal space by a base portion and a lid portion, the internal space having a hole, passing through any one of the base portion and the lid portion, formed therein and accommodating a functional component and a getter material in a state where the functional component and the getter material are disposed on the base portion; sealing the internal space by closing the hole by a sealing material; and activating the getter material by heating in a state where the getter material is disposed so as to have a gap with respect to the base portion.
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Specification