ELECTRONIC DEVICE, QUANTUM INTERFERENCE DEVICE, ATOMIC OSCILLATOR, MAGNETOCARDIOGRAPH, OSCILLATOR, ELECTRONIC APPARATUS, MOVING OBJECT, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

• US 20160352345A1
• Filed: 05/20/2016
• Published: 12/01/2016
• Est. Priority Date: 05/28/2015
• Status: Active Grant

• Current Assignee: Microchip Technology Incorporated
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: HASHI, Yukihiro
• Granted Patent: US 10,187,073 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G04F 5/14 using atomic clocks
• CPC Class Codes: H03B 17/00 Generation of oscillations using radiation source and detector, e.g. with interposed variable obturator
• CPC Class Codes: H03B 5/32 being a piezoelectric resonator selection of piezoelectric material H10N30/00
• CPC Class Codes: H03L 1/04 Constructional details for maintaining temperature constant
• CPC Class Codes: H03L 7/26 using energy levels of molecules, atoms, or subatomic particles as a frequency reference

Abstract

An atomic oscillator includes a base, an atomic cell unit that is disposed on the base, a lid that constitutes an internal space accommodating the atomic cell unit together with the base, and a getter material that is disposed on the base with a gap with respect to the base in the internal space.

Claims

1. An electronic device comprising:

a base portion;

a functional component that is disposed on the base portion;

a lid portion that constitutes an internal space accommodating the functional component, together with the base portion; and

a getter material that has a gap with respect to the base portion in the internal space and is disposed on the base portion.

2. The electronic device according to claim 1, further comprising:

a heat generating portion that is disposed on the base portion with a gap with respect to the base portion in the internal space and is capable of heating the getter material.

3. The electronic device according to claim 2, wherein the getter material and the heat generating portion are laminated on each other.

4. The electronic device according to claim 3, wherein the number of layers of the getter materials is two, and the heat generating portion is present between the two layers of the getter materials.

5. The electronic device according to claim 2, further comprising:

a conductive terminal that connects the heat generating portion and the base portion to each other.

6. The electronic device according to claim 5, wherein the conductive terminal includes copper.

7. The electronic device according to claim 1,

wherein the base portion or the lid portion includes a hole passing through an inside and an outside of the internal space, and

wherein the hole is closed by a sealing material.

8. The electronic device according to claim 1, further comprising:

a temperature adjusting unit that adjusts temperature of the functional component.

9. A quantum interference device comprising the electronic device according to claim 1.

10. A quantum interference device comprising the electronic device according to claim 2.

11. The quantum interference device according to claim 9,

wherein the functional component includes an atomic cell that accommodates metal atoms, a light source unit that emits resonating light to the metal atoms, and an atomic cell unit that includes a light receiving unit detecting the light having passed through the atomic cell.

12. The quantum interference device according to claim 10, further comprising:

a supporting portion which is disposed between the atomic cell unit and the base portion.

13. The quantum interference device according to claim 10, further comprising:

a heat generating portion that is disposed on the base portion with a gap with respect to the base portion in the internal space and is capable of heating the getter material,

wherein a distance between the base portion and the heat generating portion is smaller than a distance between the base portion and the atomic cell.

14. An atomic oscillator comprising the quantum interference device according to claim 9.

15. An atomic oscillator comprising the quantum interference device according to claim 11.

16. A magnetocardiograph comprising the quantum interference device according to claim 9.

17. An oscillator comprising the electronic device according to claim 1,

wherein the functional component is a vibrator.

18. An electronic apparatus comprising the electronic device according to claim 1.

19. A moving object comprising the electronic device according to claim 1.

20. A method of manufacturing an electronic device, the method comprising:

forming an internal space by a base portion and a lid portion, the internal space having a hole, passing through any one of the base portion and the lid portion, formed therein and accommodating a functional component and a getter material in a state where the functional component and the getter material are disposed on the base portion;

sealing the internal space by closing the hole by a sealing material; and

activating the getter material by heating in a state where the getter material is disposed so as to have a gap with respect to the base portion.