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CONFIGURATION TO REDUCE NON-LINEAR MOTION

  • US 20160363445A1
  • Filed: 09/24/2014
  • Published: 12/15/2016
  • Est. Priority Date: 01/21/2014
  • Status: Active Grant
First Claim
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1. A MEMS sensor comprising;

  • a first and second rotating arms, wherein the first and second rotating arms are coupled to each other and the first and second rotating arms are configured to counter rotate when driven into oscillation;

    at least one travelling system, where in the at least one travelling system is coupled to the first and second rotating arms;

    at least one actuator for driving the at least one travelling system into oscillation;

    wherein the at least one travelling system moves in a first direction when driven into oscillation.

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