METHOD FOR FORMING A SPLIT-GATE FLASH MEMORY CELL DEVICE WITH A LOW POWER LOGIC DEVICE

• US 20160365350A1
• Filed: 08/24/2016
• Published: 12/15/2016
• Est. Priority Date: 12/17/2014
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Chuang, Harry-Hak-Lay, Wu, Chang-Ming, Liu, Shih-Chang
• Granted Patent: US 9,741,728 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01L 21/32139 using masks
• CPC Class Codes: H01L 21/32155 Doping polycristalline - or amorphous silicon layers
• CPC Class Codes: H01L 29/40114 the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
• CPC Class Codes: H01L 29/42328 with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
• CPC Class Codes: H01L 29/66825 with a floating gate H01L29/6684 takes precedence
• CPC Class Codes: H01L 29/788 with floating gate H01L29/78391 takes precedence
• CPC Class Codes: H01L 29/7883 charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
• CPC Class Codes: H10B 41/30 characterised by the memory core region
• CPC Class Codes: H10B 41/40 characterised by the peripheral circuit region
• CPC Class Codes: H10B 41/42 Simultaneous manufacture of periphery and memory cells
• CPC Class Codes: H10B 41/47 with a floating-gate layer also being used as part of the peripheral transistor

Abstract

A method of manufacturing an embedded flash memory device is provided. A pair of gate stacks are formed spaced over a semiconductor substrate, and including floating gates and control gates over the floating gates. A common gate layer is formed over the gate stacks and the semiconductor substrate, and lining sidewalls of the gate stacks. A first etch is performed into the common gate layer to recess an upper surface of the common gate layer to below upper surfaces respectively of the gate stacks, and to form an erase gate between the gate stacks. Hard masks are respectively formed over the erase gate, a word line region of the common gate layer, and a logic gate region of the common gate layer. A second etch is performed into the common gate layer with the hard masks in place to concurrently form a word line and a logic gate.

Claims

1. A method for manufacturing an embedded flash memory device, the method comprising:

forming a pair of gate stacks spaced over a semiconductor substrate, wherein the gate stacks include floating gates and control gates arranged over the floating gates;

forming a polysilicon layer over the gate stacks and the semiconductor substrate;

performing an etch back of regions of the polysilicon layer lining the gate stacks to below top surfaces of the gate stacks, while peripheral regions of the polysilicon layer are masked, to form an erase gate between the gate stacks;

forming hard masks over the erase gate, word line regions of the remaining polysilicon layer, and logic gate regions of the remaining polysilicon layer;

performing an etch through regions of the remaining polysilicon layer unmasked by the hard masks to form word lines and logic gates; and

forming an interlayer dielectric (ILD) layer, and contacts through the ILD layer, over the gate stacks, the erase gate, the word lines, and the logic gates.

2. The method according to claim 1, further including:

forming a dielectric layer over the polysilicon layer;

forming a bottom anti-reflective coating (BARC) layer over the dielectric layer; and

before performing the etch back, performing preliminary etch backs respectively of the BARC layer and the dielectric layer to below the top surfaces of the gate stacks to mask the peripheral regions.

3. The method according to claim 1, further including:

forming the polysilicon layer conformally over the gate stacks.

4. The method according to claim 1, further including:

forming word line hard masks over the word line regions, wherein the word line hard masks are formed with widths that are greater than respective top widths of the word line regions.

5. The method according to claim 1, further including forming the hard masks by at least:

forming a hard mask layer over the remaining poly silicon layer;

performing an etch back of the hard mask layer to below the top surfaces of the gate stacks, while a logic region of the hard mask layer is masked, to form erase gate and word line hard masks; and

performing an etch through regions of the hard mask layer between the logic gate regions, while a memory region of the hard mask layer is masked, to form logic gate masks.

6. The method according to claim 1, further including:

forming the word lines with word line ledges exhibiting reduced heights relative to top surfaces of the word lines; and

forming the logic gates with top surfaces approximately even with the word line ledges.

7. The method according to claim 1, further including:

forming the polysilicon layer with a thickness of approximately 700 Angstroms.

8. The method according to claim 1, further including:

performing the etch back to a height of approximately 800 Angstroms.

9. The method according to claim 1, further including forming the gate stacks by at least:

forming the floating gates with floating gate ledges exhibiting reduced heights relative to top surfaces of the floating gates and surrounding core regions of the floating gates;

forming the control gates over the floating gates;

forming hard masks over the control gates; and

forming dielectric liners extending from the floating gate ledges to over top surfaces of the hard masks.

10. The method according to claim 9, further including forming the dielectric liners with oxide-nitride-oxide (ONO) films.

11. A method for manufacturing an embedded flash memory device, the method comprising:

forming a gate stack over a semiconductor substrate, wherein the gate stack includes a floating gate and a control gate arranged over the floating gate;

forming a gate layer over the gate stacks and the semiconductor substrate, and further lining sidewalls of the gate stacks;

forming an erase gate from the gate layer, wherein the erase gate is formed adjacent to a first side of the gate stack; and

concurrently forming a word line and a logic gate from the gate layer, wherein the word line is formed adjacent to a second side of the gate stack, opposite the first side.

12. The method according to claim 11, wherein forming the erase gate comprises:

performing a first etch into the gate layer to recess an upper surface of the gate layer to below an upper surface of the gate stack.

13. The method according to claim 12, further comprising:

forming a bottom anti-reflective coating (BARC) layer over the gate layer; and

before performing the first etch, performing a second etch into the BARC layer to recess an upper surface of the BARC layer to below the upper surface of the gate layer;

wherein the first etch is performed with the BARC layer in place to further recess the upper surface of the gate layer to below the upper surface of the BARC layer.

14. The method according to claim 11, wherein the gate layer is polysilicon, and wherein the method further comprises:

implanting dopants into the gate layer between forming the erase gate and forming the word line.

15. The method according to claim 11, further comprising:

forming a hard mask layer over the gate layer and the gate stacks;

patterning the hard mask layer to cover regions of the gate layer corresponding to the word line and the logic gate; and

performing a first etch into the gate layer with the hard mask layer in place to concurrently form the word line and the logic gate.

16. The method according to claim 15, wherein the gate stack, the erase gate, and the word line are formed over a memory cell region of the semiconductor substrate, and wherein the logic gate is formed over a logic region of the semiconductor substrate that is laterally adjacent to the memory cell region.

17. The method according to claim 16, wherein patterning the hard mask layer comprises:

performing a second etch into the hard mask layer, while the hard mask layer is partially covered by a first photoresist layer masking the logic region, to recess an upper surface of the hard mask layer to below the upper surface of the gate stack; and

performing a third etch into the hard mask layer, while the hard mask layer is partially covered by a second photoresist layer masking the memory cell region, to pattern a region of the hard mask layer covering the logic region.

18. The method according to claim 11, wherein the word line is formed with a ledge recessed below a top surface of the word line, and wherein the ledge is even with a top surface of the logic gate.

19. A method for manufacturing an embedded flash memory device, the method comprising:

forming a pair of gate stacks spaced over a semiconductor substrate, wherein the gate stacks include floating gates and control gates arranged over the floating gates;

forming a common gate layer over the gate stacks and the semiconductor substrate, and further lining sidewalls of the gate stacks;

performing a first etch into the common gate layer to recess an upper surface of the common gate layer to below upper surfaces respectively of the gate stacks, and to further form an erase gate between the gate stacks;

forming hard masks respectively over the erase gate, a word line region of the common gate layer, and a logic gate region of the common gate layer; and

performing a second etch into the common gate layer with the hard masks in place to concurrently form a word line and a logic gate respectively from the word line and logic gate regions of the common gate layer.

20. The method according to claim 19, further comprising:

removing the hard masks; and

forming an interlayer dielectric (ILD) layer that is continuous from top to bottom and that covers the gate stacks, the erase gate, the word line, and the logic gate, wherein a bottom surface of the ILD layer is spaced below a top surface of the logic gate.